Fluorine-Coated Vacuum Components for Anti-Deposition Control

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Solution Overview

Problem

In semiconductor manufacturing, substances like process gases or exhaust gases easily deposit in vacuum equipment, leading to shorter maintenance cycles and increased costs due to frequent clogging and corrosion.

Innovation Solution

An anti-deposition object with a fluorine coating layer is applied to vacuum components, featuring a higher water droplet contact angle, similar or higher hardness, and lower roughness than the base surface, which prevents deposition and enhances self-cleaning and corrosion resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If vacuum equipment is used in semiconductor manufacturing, then vacuum environment is achieved for process operations, but manufacturing process substances deposit in fluid channels leading to frequent maintenance

Engineering Contradiction:

Improvevacuum environment maintenanceVSAvoidmaintenance cycle

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The fluorine coating layer is applied in advance to the surface of the main structure before the vacuum equipment is put into service. This preliminary protective action prevents deposition from occurring in the first place, rather than requiring subsequent maintenance interventions to remove deposits.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The fluorine coating layer acts as an intermediary substance between the manufacturing process substances and the main structure surface. It provides a non-stick interface that prevents process substances from adhering to the equipment, thereby extending maintenance cycles.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If vacuum equipment operates continuously, then manufacturing productivity is maintained, but deposition accumulates requiring frequent shutdowns

Engineering Contradiction:

Improvemanufacturing outputVSAvoidoperational duration before maintenance

Core Design Contradiction:

ProductivityVSDuration of action of stationary object

Solution Approach 1:

The fluorine coating is applied beforehand to create a deposition-resistant surface, enabling continuous operation without the need for frequent shutdowns to clear deposits.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The fluorine coating layer provides self-cleaning properties through its low surface energy and non-stick characteristics, causing deposited materials to remain loosely adhered and easily removable, thereby maintaining operational continuity.

Inventive Principle:

Principle #25Self-service

3Ease of manufacture

If standard surface treatment is used, then manufacturing cost is controlled, but deposition resistance is insufficient

Engineering Contradiction:

Improvemanufacturing costVSAvoiddeposition accumulation

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The invention uses a fluorine-based coating layer composed of fluorinated compounds applied over the base material surface. This composite structure combines the mechanical properties of the substrate with the deposition-resistant properties of the fluorine layer, achieving both cost-effectiveness and superior anti-deposition performance.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The fluorine coating changes the surface energy parameters of the main structure, creating a low-energy surface that resists adhesion of manufacturing process substances. This parameter modification provides enhanced deposition resistance without significantly increasing manufacturing complexity.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The fluorine coating layer effectively prevents deposition, extends maintenance cycles, reduces maintenance costs, and provides excellent adherence and corrosion resistance in high-temperature vacuum environments.

Implementation Method 1

the fluorine coating layer has a water droplet contact angle with the manufacturing process substance higher than that of the surface of the main structure

Methodology Applied

Scientific EffectSurface energy reduction: Surface Tension

Data Source

PatentUS20240337015A1Anti-deposition object for use in vacuum environment

Publication Date: 2024.10.10 HIGHLIGHT TECH CORP

AI summary

Disclosed is an anti-deposition object for use in a vacuum environment with a main structure and a fluorine coating layer, the fluorine coating layer covers at least one surface of the main structure, the anti-deposition object contacts with a manufacturing process substance used or discharged during a manufacturing process performed by a manufacturing process equipment in the vacuum environment, the fluorine coating layer has a water droplet contact angle with the manufacturing process substance higher than that of the surface of the main structure, the fluorine coating layer has a hardness similar to or higher than that of the surface of the main structure, and the fluorine coating layer has a roughness lower than that of the surface of the main structure.