Fluorine Coating Surfactant Gradient for Chemical Liquid Purity
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Solution Overview
Problem
Existing chemical liquid purification devices and containers face issues with maintaining defect inhibition performance over time when exposed to solvents, leading to the elution of impurities and deterioration of chemical liquid quality.
Innovation Solution
A member comprising a fluorine-containing polymer and surfactant with specific concentration ratios and molecular weights, applied in the form of a coating layer on a base material, is used in liquid contact portions of containers and purification devices to inhibit impurity elution and maintain chemical liquid quality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a fluorine-containing polymer coating is applied to the container surface, then adhesion to the base material is improved, but impurity elution increases when exposed to solvents
Solution Approach 1:
The patent changes the chemical composition parameters of the coating by incorporating fluorinated surfactants with specific molecular structures (containing CF3 groups and ether oxygens) and controlling their concentration (0.1-10 wt%). This modifies the coating's chemical properties to reduce solvent interaction and impurity elution while maintaining adhesion.
Solution Approach 2:
The patent creates a composite coating material combining fluorine-containing polymer base resins with fluorinated surfactants. This composite structure leverages the adhesion properties of the polymer and the solvent resistance properties of the fluorinated surfactant, achieving both strong bonding and low impurity elution.
2Reliability
If conventional purification devices are used, then chemical liquid purification is achieved, but defect inhibition performance deteriorates over time
Solution Approach 1:
The patent applies a pre-formed fluorine-containing polymer coating with fluorinated surfactant to the container and purification device surfaces before contact with chemical liquids. This preliminary treatment creates a protective barrier that maintains defect inhibition performance throughout the service period, preventing the deterioration that occurs with conventional untreated surfaces.
3Object-affected harmful factors
If the fluorine content in the coating is increased, then solvent resistance is improved, but the atom ratio of fluorine to carbon deviates from the optimal range
Solution Approach 1:
The patent precisely controls the fluorine-to-carbon atom ratio parameter in the coating to maintain it between 0.5 and 3.0. This is achieved by selecting fluorinated surfactants with specific molecular structures and controlling their concentration, ensuring optimal balance between solvent resistance and compositional stability for maintaining defect inhibition performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively maintains the defect inhibition performance of chemical liquids for an extended period by controlling the distribution and concentration of fluorine-containing compounds, reducing impurity elution and ensuring the quality of the chemical liquid during storage and purification.
Implementation Method 1
a member containing a fluorine-containing polymer and a surfactant containing fluorine atoms... in which provided that, in at least a surface of a portion of the member, a mass-based content of the surfactant in the surface is M1
Implementation Method 2
a mass-based content of the surfactant in a position 10 nm below the surface in a thickness direction of the member is M2, M1/M2 is 0.50 to 0.90
Data Source
AI summary
A member contains a fluorine-containing polymer and a fluorine-containing surfactant, in which provided that a mass-based content of the fluorine-containing surfactant in at least a surface of a portion of the member is M1, and a mass-based content of the surfactant in a position 10 nm below the surface in a thickness direction of the member is M2, M1/M2 is 0.50 to 0.90, and an atom number ratio X1 of the number of fluorine atoms contained in the surface to the number of carbon atoms contained in the surface is 0.50 to 3.0.