Fluorine-Containing Photodegradable Coupling Agent for Micro Device Pattern Formation
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Solution Overview
Problem
Existing photodegradable coupling agents used in pattern formation methods for micro devices, such as semiconductor and organic EL displays, have limited differences in contact angles before and after light irradiation and lack sufficient sensitivity.
Innovation Solution
A fluorine-containing compound with a specific chemical structure, represented by general formulas, is used to create a substrate with chemically modified surfaces that exhibit significant changes in hydrophilicity and water repellency upon light irradiation, enabling the formation of distinct hydrophilic and water repellent regions for pattern formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional photodegradable coupling agent is used, then the coupling agent can be applied to substrate surfaces, but the difference in contact angles before and after light irradiation is insufficient
Solution Approach 1:
The patent modifies the chemical structure of the coupling agent by introducing fluorinated alkoxy groups (Rf1 and Rf2) with specific carbon chain lengths (5-18 carbons each). This parameter change in molecular structure optimizes the photodegradable coupling agent's ability to change contact angles upon light irradiation, achieving a contact angle difference of 30 degrees or more while maintaining reliable pattern formation.
2Manufacturing precision
If a conventional photodegradable coupling agent is used, then the coupling agent can be applied to substrate surfaces, but the sensitivity to light irradiation is insufficient
Solution Approach 1:
The patent optimizes the molecular parameters of the coupling agent by specifying that Rf1 and Rf2 are fluorinated alkoxy groups with 5-18 carbon atoms each. This structural parameter optimization enhances the photodegradable coupling agent's sensitivity to light irradiation, enabling precise pattern formation with appropriate light exposure conditions.
3Manufacturing precision
If the contact angle difference is increased, then the pattern formation capability is improved, but the coupling agent structure becomes more complex
Solution Approach 1:
The patent creates a composite molecular structure combining a photodegradable group, a water repellent group with fluorinated alkoxy chains (Rf1 and Rf2), and a coupling group. This composite structure achieves high pattern formation capability through synergistic effects of each functional group while maintaining a manageable overall molecular complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The fluorine-containing compound achieves a large difference in contact angles before and after light irradiation, enhancing sensitivity and allowing for effective pattern formation on substrates, particularly in micro device manufacturing.
Implementation Method 1
a photodegradable coupling agent of which the contact angle before and after light irradiation can be significantly changed
Implementation Method 2
a hydrophilic region and a water repellent region are formed on a substrate
Data Source
AI summary
A fluorine-containing compound represented by a following general formula (1) is provided. [In the general formula (1), X represents a halogen atom or an alkoxy group, R1 represents a branched chain or cyclic alkyl group having 3 to 10 carbon atoms, and Rf1 and Rf2 represent fluorinated alkoxy groups. n represents an integer of 0 or greater.]