Fluorine-Containing Photodegradable Coupling Agent for Patterning

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Solution Overview

Problem

Existing photodegradable coupling agents used in patterning methods for micro-devices do not achieve sufficient differences in contact angles before and after light irradiation and lack sensitivity to light exposure.

Innovation Solution

A fluorine-containing compound represented by General Formula (1) is used for surface modification, which changes contact angles significantly upon light irradiation, forming hydrophilic and water-repellent regions, and is integrated into a photodegradable coupling agent and patterning method for forming patterns on substrates.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If existing photodegradable coupling agents are used for surface modification, then patterning can be performed, but the difference in contact angles before and after light irradiation is insufficient and sensitivity to light is poor

Engineering Contradiction:
Improvecontact angle differenceVSAvoidlight sensitivity
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The patent introduces fluorine-containing groups into the coupling agent structure, which fundamentally changes the surface energy parameters. The fluorinated alkyl chains (CF3(CF2)nCH2CH2-) provide extremely low surface energy in the light-shielded state, creating high water repellency. Upon light irradiation, photodissociation occurs, transforming the surface chemistry and dramatically increasing hydrophilicity. This parameter change through fluorine incorporation resolves the contradiction by achieving both large contact angle difference (improving manufacturing precision) and high light sensitivity (improving reliability).

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The coupling agent combines multiple functional components: a fluorinated alkyl chain for water repellency, a photodegradable group for light-responsive transformation, and a hydrolyzable group for surface bonding. This composite structure integrates the benefits of fluorine chemistry (low surface energy) with photodissociation mechanics, creating a material that simultaneously achieves large contact angle differences and high light sensitivity, thereby resolving the technical contradiction.

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If conventional coupling agents are used, then surface patterning is achievable, but the contact angle change magnitude is limited

Engineering Contradiction:
Improvecontact angle change magnitudeVSAvoidcompound structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

By incorporating fluorine atoms into the alkyl chains, the surface energy parameter is dramatically reduced compared to conventional hydrocarbon-based coupling agents. The fluorinated groups (CF3(CF2)nCH2CH2-) create extremely water-repellent surfaces with contact angles exceeding 120 degrees in the unexposed state. This parameter change through fluorine substitution achieves large contact angle changes (resolving the manufacturing precision issue) while maintaining a relatively straightforward molecular structure that can be synthesized through standard organic chemistry methods (managing device complexity).

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The fluorine-containing compound provides a substantial difference in contact angles and enhanced sensitivity to light, enabling effective patterning by converting hydrophobic to hydrophilic surfaces, suitable for forming circuit patterns on flexible substrates with improved hydrophilicity and water repellency.

Implementation Method 1

the photodegradable coupling agent can change the contact angle significantly before and after light irradiation

Methodology Applied
Scientific EffectPhotodegradation: Photodissociation

Data Source

PatentUS11518731B2Fluorine-containing compound, substrate for patterning, photodegradable coupling agent, patterning method, and compound
Publication Date: 2022.12.06 NIKON CORP
  • US11518731B2 patent drawing
  • US11518731B2 patent drawing
  • US11518731B2 patent drawing

AI summary

A method for producing a fluorine-containing compound represented by General formula (1), wherein X represents a halogen atom or an alkoxy group, R1 represents a hydrogen atom or a linear, branched, or cyclic alkyl group having 1 to 10 carbon atoms, Rf1 and Rf2 are each independently a fluorinated alkoxy group, and n represents an integer of 0 or more.