Fluorine Passivation Film for Display Pad Shorting

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Solution Overview

Problem

In display devices like OLEDs and LCDs, the direct contact between data lines and anode electrodes during the wet etching process leads to galvanic reactions, causing unwanted metal ion contamination and abnormal growth of metal particles, resulting in short circuits and abnormal device driving.

Innovation Solution

A passivation film made of a fluorine-based material is formed on the side walls of the metal pattern layers in the pad area, preventing direct contact and reducing the risk of galvanic reactions by exposing only the necessary parts of the metal pattern layers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the protective layer is removed in the pad area to expose the data line for external connection, then the data line can contact the external drive chip, but metal ions from the anode electrode contaminate the data line through galvanic reaction during wet etching

Engineering Contradiction:
Improveexternal connection capabilityVSAvoidmetal ion contamination
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

A passivation film is introduced as an intermediary layer between the data line and the anode electrode in the pad area. This passivation film prevents direct contact between the two metal layers, thereby eliminating the galvanic reaction that causes metal ion contamination, while still allowing the data line to be exposed for external connection purposes

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of operation

If the protective layer is removed to expose the data line, then external circuit connection is enabled, but metal particles on the data line lateral surfaces abnormally grow and cause pad shorting

Engineering Contradiction:
Improveexternal circuit connectionVSAvoidpad shorting prevention
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The passivation film serves as a protective intermediary that covers the lateral surfaces of the data line in the pad area. This prevents metal particles from abnormally growing on the exposed surfaces, thereby preventing pad shorting while maintaining the external circuit connection capability

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of operation

If the protective layer is completely removed in the pad area, then the data line is fully accessible for connection, but direct contact between data line and anode electrode causes galvanic reaction and metal ion reduction

Engineering Contradiction:
Improvedata line accessibilityVSAvoidmetal ion contamination control
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The passivation film is selectively applied only in the pad area where the data line is exposed, rather than throughout the entire device. This local application maintains data line accessibility for connection while preventing galvanic reaction and metal ion contamination at the specific location where the anode electrode and data line would otherwise contact

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The passivation film acts as a local intermediary barrier between the data line and anode electrode in the pad area, preventing direct contact and the subsequent galvanic reaction that causes metal ion reduction and contamination

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The fluorine-based passivation film effectively prevents metal ion contamination and abnormal growth, ensuring reliable electrical connections and stable device operation by isolating the metal pattern layers and reducing the risk of short circuits.

Implementation Method 1

metal ions contained in the anode electrode are reduced by a galvanic reaction with metal contained in the data line during a wet etching process of forming the anode electrode

Methodology Applied
Scientific EffectGalvanic reaction:

Implementation Method 2

when an electric field is generated between pads by a driving power source, metal particles formed on the lateral surfaces of the data lined associated with the pads are abnormally grown

Methodology Applied
Scientific EffectElectrical field effect: Electric Field

Data Source

PatentUS10672799B2Display device and manufacturing method thereof
Publication Date: 2020.06.02 SAMSUNG DISPLAY CO LTD
  • US10672799B2 patent drawing
  • US10672799B2 patent drawing
  • US10672799B2 patent drawing

AI summary

A display device may include a substrate, an active pattern layer, a gate insulating layer, a first metal pattern layer, an interlayer insulating layer, a second metal pattern layer, and a passivation film. The active pattern layer may be disposed on the substrate. The gate insulating layer may be disposed on the active pattern layer. The first metal pattern layer may be disposed on the gate insulating layer. The interlayer insulating layer may be disposed on the first metal pattern layer. The second metal pattern layer may be disposed on the interlayer insulating layer. The passivation film may be disposed on the side wall of the second metal pattern layer.