Fluoro-alcohol SAP for Block Copolymer Orientation
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Solution Overview
Problem
Current methods for orienting block copolymer domains with high interaction parameters (high-chi) struggle to achieve perpendicularly oriented structures without using top-coat based orientation control, which introduces complexity in lithographic processes, especially for sub-10 nm feature sizes.
Innovation Solution
A composition comprising a block copolymer with a polycarbonate block and a surface active polymer (SAP) containing a fluoro-alcohol repeat unit is used, dissolved in a solvent, and applied to an underlayer, allowing self-assembly to form perpendicularly oriented phase-separated domains without a top-coat, by exploiting the preferential solubility of the SAP in the polycarbonate domain.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If top-coat based orientation control is used for high-chi block copolymers, then perpendicular orientation of domains can be achieved, but process complexity increases
Solution Approach 1:
The patent removes the top-coat layer from the orientation control system, extracting only the essential function of orientation control through the underlayer alone. This eliminates the need for additional top-coat application processes while maintaining perpendicular domain orientation through the SAP-modified underlayer.
Solution Approach 2:
The underlayer is given multiple functions: it serves as both the substrate support and the orientation control layer through SAP incorporation. This multi-functional design eliminates the need for a separate top-coat layer, simplifying the overall process while achieving the desired perpendicular orientation.
2Length of moving object
If high-chi block copolymers are used for sub-10 nm patterning, then feature miniaturization is enabled, but neutral underlayer properties alone are insufficient for perpendicular orientation
Solution Approach 1:
The patent introduces SAP with specific fluoro-alcohol groups that preferentially partition into the polycarbonate domain, creating local compositional differences. This local enrichment of SAP in specific domains modifies surface energy locally, enabling perpendicular orientation in the high-chi block copolymer system.
Solution Approach 2:
The patent changes the surface energy parameters of the underlayer by incorporating SAP containing fluoro-alcohol groups. This parameter modification allows the underlayer to provide the necessary orientation control for high-chi block copolymers, enabling perpendicular orientation at sub-10 nm scales.
3Device complexity
If SAP with fluoro-alcohol groups is added to the composition, then perpendicular orientation is achieved without top-coat, but composition complexity increases
Solution Approach 1:
The patent combines the orientation control function with the underlayer composition by incorporating SAP directly into the underlayer formulation. This merging of functions eliminates the need for a separate top-coat layer, reducing the number of process steps while managing composition complexity through selective SAP placement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the formation of perpendicularly oriented lamellar domains, facilitating high-resolution patterning without additional process complexity, and allows for the miniaturization of features down to sub-10 nm sizes.
Implementation Method 1
the SAP preferentially associates with the polycarbonate domain, lowering its surface energy and enabling perpendicular orientation
Implementation Method 2
allowing the block copolymer to self-assemble into perpendicularly oriented domains
Implementation Method 3
The ability of a BCP to phase separate depends on the Flory Huggins interaction parameter chi (χ) and degree of polymerization of the block copolymer
Implementation Method 4
The neutral wetting properties of the orientation control layer (underlayer) can be controlled by adjusting the composition of styrene and methyl methacrylate in order to enable perpendicular orientation of the BCP lamellar domains
Data Source
AI summary
A film layer comprising a high-chi (χ) block copolymer for self-assembly and a hexafluoroalcohol-containing surface active polymer (SAP) was prepared on a substrate surface that was neutral wetting to the domains of the self-assembled block copolymer. The block copolymer comprises at least one polycarbonate block and at least one other block (e.g., a substituted or unsubstituted styrene-based block). The film layer, whose top surface has contact with an atmosphere, self-assembles to form a lamellar or cylindrical domain pattern having perpendicular orientation with respect to the underlying surface. Other morphologies (e.g., islands and holes of height 1.0 Lo) were obtained with films lacking the SAP. The SAP is preferentially miscible with, and lowers the surface energy of, the domain comprising the polycarbonate block.