Fluoroelastomer End-Group Passivation for Low-Volatile Stability
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Solution Overview
Problem
Fluoroelastomers used in semiconductor processing suffer from unstable end groups that decompose at high temperatures, releasing gases that affect processing and physical properties, and residual components from polymerization lead to pollution and yellowing, making them unsuitable for high-cleanliness applications.
Innovation Solution
A method involving devolatilization with liquid or supercritical fluid followed by passivation, washing, and drying to stabilize end groups, using fluorination and amination treatments to convert unstable end groups into stable forms, thereby reducing volatile components and improving mechanical performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If fluoroelastomer undergoes high-temperature processing to remove residual components, then volatile components are reduced, but unstable end groups decompose and release gases that affect processing and physical properties
Solution Approach 1:
The patent applies preliminary action by performing end group passivation treatment before high-temperature processing. Unstable end groups are converted to stable end groups in advance, preventing gas release during subsequent high-temperature processing while still allowing residual components to be removed.
Solution Approach 2:
The patent applies preliminary anti-action by introducing a counteracting chemical treatment that stabilizes end groups before the harmful high-temperature processing occurs. The passivation treatment creates a protective effect that counteracts the potential decomposition and gas release that would otherwise occur during high-temperature processing.
2Stability of the object's composition
If fluoroelastomer is dried at low temperature to avoid viscosity increase, then particle adhesion is reduced, but volatile components including unstable end groups cannot be effectively removed
Solution Approach 1:
The patent applies preliminary action by performing end group passivation before drying treatment. This converts unstable end groups to stable ones in advance, allowing the material to be dried at low temperatures without fear of decomposition, thereby maintaining particle flowability while still enabling effective removal of volatile components through the passivation process.
Solution Approach 2:
The patent applies parameter changes by modifying the chemical state of end groups through passivation treatment. This chemical transformation allows the drying process to proceed at lower temperatures while still achieving effective removal of volatile components, as the passivated end groups no longer decompose at these lower temperatures.
3Loss of substance
If conventional drying and devolatilization is performed on perfluoroether elastomer, then volatile components are removed, but the elastomer shows yellow or amber color indicating degradation
Solution Approach 1:
The patent applies preliminary anti-action by performing end group passivation treatment before drying and devolatilization. This creates a protective effect that prevents oxidation and yellowing during the subsequent high-temperature processing, while still allowing volatile components to be effectively removed.
Solution Approach 2:
The patent applies preliminary action by stabilizing end groups through passivation before the drying and devolatilization process. This preliminary stabilization prevents the degradation and yellowing that would otherwise occur during high-temperature treatment, enabling effective volatile component removal without color degradation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively stabilizes end groups, reducing volatile components and preventing color change under high-temperature conditions, enhancing mechanical properties and suitability for high-cleanliness semiconductor manufacturing.
Implementation Method 1
subjecting a fluoroelastomer to a devolatilization treatment by using a liquid or a supercritical fluid
Implementation Method 2
The fluoroelastomer is devolatilized by using liquid or supercritical fluid
Implementation Method 3
end group passivation is to change unstable end groups into stable end groups through chemical treatment. For example, PFA resin uses 1-10% fluorine gas (with nitrogen as the balance gas) for end group passivation (conversion to stable end group —CF3)
Implementation Method 4
50% NH3 amination (conversion to stable end group —CONH2)
Implementation Method 5
drying and devolatilized at a temperature of up to 280° C. to remove water in the polymer
Data Source
AI summary
Provided in the present application is a method for passivating an end group of a fluoroelastomer, which method is applied to the technical field of fluoroelastomers. The method comprises: S1, subjecting a fluoroelastomer to a devolatilization treatment by using a liquid or a supercritical fluid; S2, subjecting the devolatilized fluoroelastomer to a passivation treatment, and removing a passivation medium; and S3, washing the fluoroelastomer with deionized water, dehydrating the fluoroelastomer, and then drying same to obtain a devolatilized and passivated fluoroelastomer. By passivating the fluoroelastomer after liquid or supercritical fluid devolatilization, the obtained fluoroelastomer has less volatile components; by controlling the concentration of the passivation medium and the passivation time so as to control and adjust the end group passivation degree or the end group stabilization degree, the passivated fluoroelastomer has good processability and storage stability, and does not change color when in contact with a high-temperature and oxidation environment.