Fluoroelastomer Sealing Composition for Plasma-Resistant Uniform Mixing
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Solution Overview
Problem
Conventional uncrosslinked rubber compositions, such as those using crosslinkable fluoroelastomers and liquid or oily compounds with a perfluoro skeleton, face challenges in achieving uniform mixing and limited usage amounts, making it difficult to form sealing materials with desired plasma resistance and physical properties.
Innovation Solution
An elastomer composition comprising a crosslinkable fluoroelastomer and a compound with a perfluoro skeleton, synthesized through a reaction between a compound with an ethylenically unsaturated bond and a reactive organosilicon compound, is mixed in specific ratios to achieve a uniform and balanced composition, eliminating the need for silica fillers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a liquid or oily compound having a perfluoro skeleton is used to obtain plasma resistance, then plasma resistance is improved, but mixing uniformity deteriorates
Solution Approach 1:
The patent changes the viscosity parameter of the perfluoro skeleton compound from liquid/oily range to a higher viscosity range (100-10000 cP at 25°C). This parameter change enables the compound to be easily mixed with crosslinkable fluoroelastomer while maintaining plasma resistance, thus resolving the contradiction between plasma resistance and mixing uniformity
Solution Approach 2:
The patent specifies particular structural features for the perfluoro skeleton compound (Formula 1 structure with specific R1-R6 groups) to achieve optimal local molecular characteristics. This local structural quality ensures both plasma resistance and compatibility with fluoroelastomer for uniform mixing
2Reliability
If the amount of perfluoro skeleton compound is increased to improve plasma resistance, then plasma resistance is improved, but composition uniformity deteriorates
Solution Approach 1:
By changing the viscosity parameter of the perfluoro skeleton compound to an optimal range (100-10000 cP), the patent enables increased compound content (5-100 parts per 100 parts fluoroelastomer) while maintaining composition uniformity. The viscosity modification allows higher concentrations without sacrificing mixability
Solution Approach 2:
The patent applies partial action by using a moderate amount of perfluoro skeleton compound (5-100 parts) rather than excessive amounts, achieving sufficient plasma resistance while maintaining uniform composition through the optimized viscosity characteristics
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resulting elastomer composition and sealing material exhibit excellent plasma resistance, hardness, tensile strength, and elongation, suitable for semiconductor manufacturing, without generating particles in plasma atmospheres.
Implementation Method 1
a crosslinkable fluoroelastomer (A) and a compound (B) having a perfluoro skeleton... excellent in plasma resistance (radical resistance)
Implementation Method 2
a compound (B) having a perfluoro skeleton is a product of a reaction between a compound with a perfluoro skeleton having an ethylenically unsaturated bond and a reactive organosilicon compound having a hydrosilyl group
Data Source
Figure 1
AI summary
An embodiment of the present invention relates to an elastomer composition, a method for producing an elastomer composition, a sealing material, or a method for producing a sealing material, the elastomer composition including a crosslinkable fluoroelastomer (A) and a compound (B) having a perfluoro skeleton, the compound having a viscosity of 1000 to 9000 Pa·s at 23°C, which is measured using a cone-plate viscometer in accordance with the method for measuring a viscosity of a liquid specified in JIS Z 8803:2011.