Fluoroelastomer Seal Composition for Plasma-Resistant Low-Particle Sealing
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Solution Overview
Problem
Conventional seal materials for semiconductor manufacturing apparatuses face challenges in achieving both excellent mechanical properties, reduced compression set, and effective plasma resistance while preventing particle generation.
Innovation Solution
A rubber composition comprising a crosslinking reactive fluorine-containing rubber, a compound represented by specific formula (b-1), and another compound represented by formula (c-1), optionally with an organic peroxide, a reactive compound, or a fluorine-containing oligomer, is used to create a fluorine-containing elastomer and seal material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If fluororesin or carbon black is added to impart mechanical properties, then mechanical strength is improved, but particle generation occurs when exposed to plasma
Solution Approach 1:
The invention removes harmful fillers (fluororesin and carbon black) from the seal material composition while maintaining mechanical properties through alternative crosslinking mechanisms. The patent extracts the problematic particles by using a filler-free formulation that relies on chemical crosslinking between fluorinated polyether and dihaloolefin rather than particulate reinforcement.
Solution Approach 2:
The invention changes the fundamental mechanism of mechanical property enhancement from particulate reinforcement to chemical crosslinking. By controlling the crosslinking degree through specific molar ratios of fluorinated polyether to dihaloolefin (0.01-1.0 mol/mol), the patent achieves optimal mechanical properties without introducing particle-generating fillers.
2Object-generated harmful factors
If radiation crosslinking is used to adjust mechanical properties without filler, then particle generation is prevented, but plasma resistance is deteriorated
Solution Approach 1:
The invention changes the crosslinking mechanism from radiation-induced to chemical-induced crosslinking. By using dihaloolefin compounds that react chemically with fluorinated polyether through halogen exchange reactions, the patent achieves crosslinking without radiation treatment, thereby maintaining both particle-free structure and plasma resistance.
Solution Approach 2:
The invention introduces dihaloolefin compounds as intermediary agents that facilitate crosslinking through chemical reactions rather than radiation. These intermediaries (compounds with formula (1) where X is Cl or Br) act as bridges between fluorinated polyether chains, enabling crosslinking that preserves plasma resistance while preventing particle generation.
3Reliability
If compression set is reduced through crosslinking and filler use, then sealability is improved, but both plasma resistance and particle generation issues arise
Solution Approach 1:
The invention creates a composite crosslinked structure through the chemical reaction between fluorinated polyether and dihaloolefin compounds. This composite network structure achieves reduced compression set and improved sealability while maintaining plasma resistance and preventing particle generation, as the crosslinked matrix provides mechanical integrity without particulate fillers.
4Ease of operation
If mechanical properties are enhanced through filler addition, then handling property is improved, but the filler becomes particles under plasma exposure
Solution Approach 1:
The invention extracts and eliminates all particulate fillers from the seal material composition. By relying solely on chemical crosslinking between fluorinated polyether and dihaloolefin compounds, the patent achieves adequate handling properties through the crosslinked network structure without introducing any filler materials that could become particles under plasma exposure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a seal material with excellent mechanical properties, reduced compression set, superior plasma resistance, and prevention of particle generation, achieving a good balance of these properties.
Implementation Method 1
a crosslinking reactive fluorine-containing rubber, a compound represented by the following formula (b-1)... and a compound represented by the following formula (c-1)... wherein the component (b) is comprised in an amount of 5 to 30 mmol based on 100 g of the component (a), and the component (c) is comprised in an amount of 2 to 30 mmol based on 100 g of the component (a)
Implementation Method 2
The rubber composition according to 1 or 2, further comprising (d) an organic peroxide
Data Source
AI summary
A rubber composition comprising: (a) a crosslinking reactive fluorine-containing rubber, (b) a compound represented by the following formula (b-1): and (c) a compound represented by the following formula (c-1):