Fluoroelastomer Sealing Composition for Plasma-Resistant Moldability
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Solution Overview
Problem
Conventional crosslinkable fluoroelastomer compositions used in sealing materials exhibit poor moldability and require extended time for uniform mixing, leading to suboptimal sheeting properties and inadequate tensile stress at 100% elongation, particularly in applications involving plasma environments where filler content is limited.
Innovation Solution
A composition comprising a blend of crosslinkable fluoroelastomers with high fluorine content, specifically 69% or more for one and 55-68% for another, along with ethylenically unsaturated bond-containing compounds and a peroxide-crosslinking agent, with a filler content of 5 parts by mass or less, to enhance uniformity, moldability, and tensile stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If a conventional crosslinkable fluoroelastomer composition is used, then the sealing material can be produced, but it takes a long time to achieve uniform mixing of components
Solution Approach 1:
The patent changes the molecular weight parameters of the fluoroelastomer components, specifically using a fluoroelastomer with low average molecular weight (Mn: 5,000-50,000) combined with another fluoroelastomer having different molecular weight characteristics. This parameter change in molecular weight distribution improves the流动性 and mixability of the composition, reducing mixing time while maintaining uniformity.
Solution Approach 2:
The patent creates a composite elastomer system by combining multiple fluoroelastomer types with different molecular weight characteristics and fluorine contents (55-68% and 69% or more). This composite approach leverages the complementary properties of each component to achieve both rapid mixing and uniform composition stability.
2Ease of manufacture
If conventional elastomer composition is used for sheeting, then the composition can be processed, but it is not easy to form a sheet due to poor sheeting property
Solution Approach 1:
The patent modifies the molecular weight parameters of the fluoroelastomer composition, using low average molecular weight (Mn: 5,000-50,000) fluoroelastomer which improves the composition's flexibility and deformability. This enables the material to be easily formed into sheets and molded products, significantly improving sheeting property and ease of manufacture.
3Object-affected harmful factors
If no filler or small amount of filler is added to the sealing material, then plasma resistance is maintained, but tensile stress at 100% elongation is insufficient
Solution Approach 1:
The patent changes the molecular weight parameters of the fluoroelastomer, specifically using low average molecular weight (Mn: 5,000-50,000) which increases the number of molecular chains per unit volume. This creates more crosslinking sites and forms a denser crosslinked network structure, thereby improving tensile stress at 100% elongation without requiring filler addition, thus maintaining plasma resistance.
Solution Approach 2:
The patent creates a composite fluoroelastomer system combining multiple fluoroelastomer types with different molecular weight characteristics. This composite structure enables the formation of a robust crosslinked network that achieves high tensile stress without fillers, while maintaining the plasma resistance inherent to fluoroelastomers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the rapid formation of a uniform elastomer composition with improved moldability and sheeting properties, resulting in a sealing material with balanced hardness, tensile strength, elongation at break, and 100% modulus, while maintaining excellent plasma resistance and crack resistance.
Implementation Method 1
a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content of 69% by mass or more; and a crosslinkable fluoroelastomer (A2) that is other than a perfluoroelastomer and has a fluorine content in a range of 55 to 68% by mass
Data Source
AI summary
One embodiment of the present invention relates to an elastomer composition, a sealing material, or a method for producing a sealing material, in which the elastomer composition includes a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content of 69% by mass or more and a crosslinkable fluoroelastomer (A2) that is other than a perfluoroelastomer and has a fluorine content in a range of 55 to 68% by mass, and a content of the fluoroelastomer (A1) is 60 to 95% by mass based on 100% by mass of the total of the fluoroelastomers (A1) and (A2).