Radiation-Crosslinked Fluoroelastomer Seals for Plasma-Resistant Sheeting
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Solution Overview
Problem
Conventional crosslinkable fluoroelastomers used in sealing materials exhibit poor moldability and physical properties such as tensile strength and elongation at break, particularly when forming sheets, and require a long time for uniform composition mixing.
Innovation Solution
A radiation-crosslinked sealing material composed of a crosslinkable fluoroelastomer with 66-68% fluorine content, a peroxide-crosslinkable fluoroelastomer, and specific ethylenically unsaturated bond-containing compounds, along with a limited filler content, to enhance moldability and physical properties like tensile strength and elongation at break.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional crosslinkable fluoroelastomer is used, then plasma resistance and radical resistance are improved, but the time required to produce uniform elastomer composition increases
Solution Approach 1:
The patent changes the fluorine content parameter to a specific range (66-68% by mass) to optimize both mixing time and plasma resistance. This parameter optimization allows the elastomer composition to achieve uniform mixing faster while maintaining excellent plasma resistance properties.
Solution Approach 2:
The patent creates a composite elastomer composition by blending the crosslinkable fluoroelastomer with specific additives including crosslinking agents and crosslinking aids. This composite formulation improves processability and reduces mixing time while preserving the plasma resistance of the base fluoroelastomer.
2Reliability
If a conventional elastomer composition is used, then plasma resistance is maintained, but sheeting property and moldability deteriorate
Solution Approach 1:
The patent optimizes the fluorine content parameter (66-68% by mass) which fundamentally changes the rheological properties of the elastomer, enabling it to be properly caught between rolls and formed into sheets with excellent surface finish, while maintaining plasma resistance.
Solution Approach 2:
The patent introduces functional groups at specific locations within the elastomer structure that provide localized adhesion to metal rolls during sheeting, while the bulk material maintains its plasma resistance properties. This local quality enhancement solves the sheeting problem without compromising overall performance.
3Reliability
If a conventional elastomer composition is used, then plasma resistance is achieved, but tensile strength and elongation at break are insufficient
Solution Approach 1:
The patent formulates a composite elastomer composition incorporating crosslinking agents and crosslinking aids that create a three-dimensional network structure. This composite structure simultaneously enhances tensile strength and elongation at break while preserving the plasma resistance of the fluoroelastomer base material.
Solution Approach 2:
The patent optimizes the crosslinking density and fluorine content parameters to achieve a balanced structure that provides both mechanical strength and chemical resistance. The specific fluorine content range (66-68%) ensures optimal balance between plasma resistance and mechanical properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a sealing material with improved moldability, high tensile strength, elongation at break, and balanced physical properties, suitable for semiconductor manufacturing and plasma processing applications, with enhanced plasma resistance and crack resistance.
Implementation Method 1
crosslinking including a step of irradiating with radiation is performed at the time of the crosslinking
Data Source
AI summary
One embodiment of the present invention relates to a sealing material or a method for producing a sealing material, in which the sealing material is a radiation-crosslinked body of an elastomer composition including a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, a crosslinking agent, and a crosslinking aid, and the fluoroelastomer (A) contains a crosslinkable fluoroelastomer (A1) that is other than a perfluoroelastomer and has a fluorine content in a range of 66 to 68% by mass.