Fluoropolyether Release Layer for Imprint Mold Releasability

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Solution Overview

Problem

Conventional molds for imprint processing have insufficient releasability, leading to easy separation or adhesion of transfer targets from substrates during repeated transfers.

Innovation Solution

Applying a composition containing fluoropolyether to the release layer of a mold with an uneven pattern, which includes a compound with a hydrolyzable group, and pressing the mold to transfer the pattern onto a target while irradiating with ultraviolet rays to enhance releasability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional release agents (silicone oil or fluororesin solution) are used on the mold surface, then releasability is improved, but the release agent enters recessed grooves of the fine pattern and prevents normal pattern transfer

Engineering Contradiction:
ImprovereleasabilityVSAvoidpattern transfer accuracy
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies different properties to different parts of the mold surface: the release agent is designed to be located primarily at the surface level rather than penetrating into grooves, creating a localized release function at the interface while maintaining pattern fidelity in the recessed areas

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the physical-chemical parameters of the release agent system by using fluoropolyether with specific molecular weight and chemical structure, and controls the amount applied (0.01-10 µL/cm²), optimizing both releasability and pattern transfer capability

Inventive Principle:
Principle #35Parameter changes

2Productivity

If transfer is repeated multiple times, then productivity is improved, but transfer targets easily separate from substrates or adhere to molds due to insufficient releasability

Engineering Contradiction:
Improvetransfer repetition capabilityVSAvoidtransfer target adhesion control
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The fluoropolyether release agent provides self-releasing properties that automatically prevent adhesion during repeated transfers, eliminating the need for additional release mechanisms and maintaining consistent performance across multiple transfer cycles

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The release agent is applied to the mold surface before each transfer operation, pre-establishing the non-adhesive condition that prevents transfer target adhesion during subsequent repeated transfers

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method improves the releasability of transfer targets from substrates and reduces adhesion to molds, enabling high productivity and low-cost production of transfer targets with transferred patterns.

Implementation Method 1

fluoropolyether applied to a release layer of a mold can improve the releasability

Methodology Applied
Scientific EffectSurface tension reduction: Surface Tension

Implementation Method 2

The transfer target preferably contains an ultraviolet-curable resin. In step (2), preferably, the transfer target is irradiated with ultraviolet rays while the mold is pressed to the transfer target.

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentEP3470199B1Process for producing receiving object having transferred pattern
Publication Date: 2022.09.07 DAIKIN INDUSTRIES LTD
  • EP3470199B1 patent drawingFigure 1
  • EP3470199B1 patent drawing
  • EP3470199B1 patent drawing

AI summary

The invention provides a method for producing a transfer target which is less likely to separate from a substrate or adhere to a mold even when transfer is repeated. The production method includes the steps of: (1) applying a composition containing a fluoropolyether to a release layer of a mold having an uneven pattern on a surface thereof; (2) pressing the mold to a transfer target and transferring the uneven pattern; and (3) releasing the mold from the transfer target, thereby providing the transfer target having a transferred pattern.