Fluoropolymer Fluid Delivery Blocks for Dead-Volume-Free Chemical Flow
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Solution Overview
Problem
Existing liquid chemical delivery systems for semiconductor manufacturing are inefficient due to large size, corrosion issues with metal components, and dead volumes in fluid passageways, which lead to contamination and increased costs.
Innovation Solution
A modular, tubeless liquid chemical delivery system using fluoropolymer substrate blocks with seamless fluid pathways and a sealing assembly featuring replaceable inserts and tongue-and-groove seals, reducing system size and minimizing dead volumes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional liquid chemical delivery systems are used with metal components and conventional passageways, then the system can deliver chemicals, but the system size becomes large and dead volumes cause contamination
Solution Approach 1:
The system is divided into modular substrate blocks that can be independently manufactured and assembled. Each block contains specific fluidic functions, allowing the system to be configured with minimal necessary components and reduced overall footprint while maintaining contamination-free operation through dedicated seamless passageways in each module.
Solution Approach 2:
Fluid passageways are formed as three-dimensional seamless channels within the substrate blocks rather than traditional two-dimensional surface pathways. This volumetric approach eliminates dead volumes and sharp corners where contamination could occur, while the modular 3D structure allows compact system integration.
2Strength
If metal components are used in the liquid distribution system, then the system can be structurally sound, but corrosion and metal ion deposition occur
Solution Approach 1:
The substrate blocks are constructed from composite materials that combine the structural integrity of rigid materials with the chemical inertness of fluoropolymers. This composite approach provides both mechanical strength for structural support and resistance to corrosion and metal ion deposition, eliminating the harmful effects associated with traditional metal components.
Solution Approach 2:
The system uses fluoropolymer materials that create a chemically inert environment for liquid chemical delivery. These materials resist corrosion and prevent metal ion deposition by forming a non-reactive barrier between the chemicals and any metal components, effectively creating an inert chemical environment throughout the fluid path.
3Ease of operation
If conventional sealing methods are used, then components can be connected, but the system size increases and maintenance becomes difficult
Solution Approach 1:
Sealing structures are nested within the substrate blocks themselves rather than being external components. The seals are integrated into the modular architecture, allowing compact integration that reduces system footprint while maintaining ease of replacement through modular access.
Solution Approach 2:
The sealing system is designed with replaceable seal elements that can be quickly removed and replaced without replacing entire substrate blocks. This allows maintenance personnel to discard degraded seals and recover the valuable substrate block infrastructure, simplifying maintenance while keeping the system compact.
Data Source
AI summary
A substrate block for a fluid delivery system is provided, the substrate block having an upper surface. The upper surface has an inlet substrate port and an outlet substrate port formed into the upper surface. A substrate fluid passageway extends from the inlet substrate port and the outlet substrate port. The substrate fluid passageway extends in a smooth arc which is free of corners or angular walls.