Thin-Wall Fluoropolymer Molded Article for High-Temperature Containment
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Solution Overview
Problem
Existing injection molded articles used in semiconductor processing face challenges with high side surface heights leading to deformation, abrasion, and damage at high temperatures, while maintaining a smooth surface and preventing chemical solution scattering.
Innovation Solution
An injection molded article with a copolymer containing tetrafluoroethylene and fluoro(alkyl vinyl ether) units, optimized for high height-to-thickness ratio, high load resistance, and controlled melt flow rate, to ensure high temperature resistance and abrasion resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the side surface height is increased to prevent chemical solution scattering, then the containment performance is improved, but the deformation and damage at high temperatures worsens
Solution Approach 1:
The patent changes the material parameters by specifying a copolymer with tetrafluoroethylene unit content of 94-98% and fluoro(alkyl vinyl ether) unit content of 2-6%, along with controlling melt flow rate (30-65 g/10min at 372°C) and functional groups (50 or less per 10^6 main-chain carbon atoms). These parameter optimizations enable the material to maintain both high temperature resistance and structural integrity while supporting the increased side surface height for chemical solution containment.
2Shape
If the side surface height is increased to maintain smooth surface appearance, then the aesthetic quality is improved, but the abrasion resistance at high temperatures worsens
Solution Approach 1:
The patent optimizes material composition parameters including copolymer structure with specific unit contents, melt flow rate, and functional group concentration. These parameter changes enhance the material's inherent abrasion resistance, allowing the side surface to maintain smooth appearance while withstanding high temperature abrasion forces without degradation.
3Weight of moving object
If the side surface thickness is reduced to decrease weight, then the weight is reduced, but the load bearing capacity at high temperatures worsens
Solution Approach 1:
The patent changes the material's physical and chemical parameters by specifying precise copolymer composition ratios, melt flow rate, and functional group content. These parameter optimizations increase the material's specific strength (strength-to-weight ratio), enabling thin-walled structures to maintain adequate load bearing capacity at high temperatures while minimizing weight.
Solution Approach 2:
The patent employs a copolymer composite material system combining tetrafluoroethylene and fluoro(alkyl vinyl ether) units. This composite polymer structure provides enhanced mechanical properties and thermal stability, allowing reduced wall thickness without compromising load bearing capacity under high temperature conditions.
Data Source
AI summary
Provided is an injection molded article including a bottom surface section, and a side surface section erected from a peripheral edge of the bottom surface section, wherein the height from the bottom surface section of the side surface section is 3.8 cm or larger, the ratio of the height from the bottom surface section of the side surface section to the average thickness of the side surface section (height/thickness) is 19.0 or more, the load applied to the lower end section of the side surface section is 0.8 kPa or higher, the injection molded article contains a copolymer containing tetrafluoroethylene unit and a fluoro(alkyl vinyl ether) unit, the content of the fluoro(alkyl vinyl ether) unit of the copolymer is 4.5 to 6.0% by mass with respect to the whole of the monomer units, the melt flow rate at 372° C. of the copolymer is 35.0 to 60.0 g/10 min, and the number of functional groups of the copolymer is 50 or less.