Fluororesin Heat Transfer Layer for Plasma Cooling Durability
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Solution Overview
Problem
Existing plasma processing apparatuses face challenges in efficiently transferring heat to cooling plates while maintaining heat transfer material integrity and preventing contamination due to heat, plasma, and radicals, which affects the longevity and reliability of the processing conditions.
Innovation Solution
Incorporating a heat transfer layer made of fluorine-based resin or elastomer, optionally with fillers like alumina or boron nitride, onto a base material such as Si or SiC, which enhances thermal conductivity and resistance to heat and plasma, thereby improving heat soaking properties and reducing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a heat transfer material is disposed between the upper electrode and the cooling plate to improve thermal conductivity, then heat soaking property is improved, but the material deteriorates due to heat, plasma, and radicals over time
Solution Approach 1:
The patent uses a composite heat transfer material comprising a fluororesin matrix combined with thermally conductive fillers (alumina, boron nitride, or silicon carbide particles). This composite structure provides both high thermal conductivity for heat soaking and resistance to heat/plasma/radicals for long-term durability in the plasma processing environment.
Solution Approach 2:
The patent specifies controlled particle size ranges for the fillers (alumina: 1-10 μm, boron nitride: 1-5 μm, silicon carbide: 1-3 μm) and their content ratios (5-50 wt%) to optimize both thermal conductivity and plasma resistance. By adjusting these parameters, the material achieves improved heat transfer while maintaining structural integrity under plasma exposure.
2Temperature
If a heat transfer material with high thermal conductivity is used between the focus ring and pedestal, then heat transfer is improved, but contamination of the substrate occurs due to material deterioration
Solution Approach 1:
The fluororesin-based composite material provides high thermal conductivity through the filler particles while the fluororesin matrix resists plasma degradation. This prevents material breakdown and subsequent substrate contamination, ensuring both effective heat transfer and clean processing conditions.
Solution Approach 2:
The heat transfer material is designed to be replaceable and cost-effective, allowing periodic replacement before significant degradation occurs. This ensures continuous contamination-free operation while using economically viable materials that can be easily replaced rather than requiring permanent, highly expensive materials.
3Temperature
If a heat transfer material is used between the electrode plate and cooling plate, then heat transfer property is improved, but the material structure becomes complex
Solution Approach 1:
The patent employs a composite material that combines fluororesin with thermally conductive filler particles. This approach achieves high heat transfer efficiency through the filler network while maintaining relative structural simplicity compared to multi-layer constructions, as the fillers are dispersed within the fluororesin matrix forming a homogeneous composite.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution provides a member for the plasma processing apparatus with enhanced heat resistance, plasma resistance, and reduced contamination, ensuring stable and long-lasting heat transfer performance.
Implementation Method 1
a heat transfer layer provided on one surface of the base material, in which the heat transfer layer contains at least one of a fluorine-based resin and a fluorine-based elastomer
Implementation Method 2
the heat transfer material disposed between the electrode plate for the plasma processing apparatus and the cooling plate is unlikely to be deteriorated by heat, plasma, and radicals of by-products
Data Source
AI summary
A member for a plasma processing apparatus includes a base material and a heat transfer layer provided on one surface of the base material, and the heat transfer layer contains at least one of a fluorine-based resin and a fluorine-based elastomer.