Selective Fluororesin Coating for Low-Friction Substrate Handling

The patent applies local quality by forming the fluororesin film only in specific regions where friction reduction is needed, rather than uniformly across the entire substrate. The film is deposited in a plurality of regions while leaving other areas without the film, creating spatially varying properties that simultaneously reduce friction in contact areas and maintain adhesion in pattern formation areas.

The patent resolves this contradiction by implementing local quality through selective regional deposition. The fluororesin film is formed in a plurality of specific regions rather than uniformly across the entire substrate surface. This allows friction reduction to be achieved in regions where the substrate contacts the holder, while maintaining proper adhesion properties in regions where pattern formation occurs, thus balancing both requirements locally.

The patent applies partial action by forming the fluororesin film in a plurality of discrete regions rather than as a continuous uniform layer. This regional deposition approach allows the film to be sufficiently thick in specific friction-prone areas to achieve friction reduction, while avoiding excessive film formation in other areas where it would cause adhesion problems or complicate pattern formation.

The patent applies preliminary action by performing a hydrophobizing process on the substrate surface before forming the fluororesin film. This preliminary treatment modifies the substrate surface properties to enhance subsequent film deposition control, allowing the fluororesin film to be formed with better spatial accuracy and adhesion in the desired regions without requiring additional complex post-processing steps.