Fluorescent Nitrogen-Vacancy Diamond VUV Sensor
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Solution Overview
Problem
Conventional sensors for detecting vacuum-ultraviolet (VUV), extreme-ultraviolet (EUV), and X-ray radiation, such as photomultiplier tubes, have poor quantum efficiencies due to limited viewport transmission and suffer from significant aging effects when using organic fluorescent materials.
Innovation Solution
A fluorescent nitrogen-vacancy diamond (FNVD) sensing sheet with nitrogen-vacancy centers is used, which absorbs VUV/EUV/X-rays and emits fluorescence in a detectable wavelength range, overcoming the limitations of conventional sensors by expanding spectral range and improving stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If photomultiplier tubes with MgF2 viewport are used to detect VUV radiation, then detection capability is achieved, but quantum efficiency is poor due to limited viewport transmission
Solution Approach 1:
The patent introduces a fluorescent material layer as an intermediary between the VUV radiation source and the photomultiplier tube. This fluorescent material absorbs VUV photons and re-emits them at longer wavelengths that can pass through the MgF2 viewport with higher transmission, thereby mediating the detection process and improving quantum efficiency while maintaining detection capability
Solution Approach 2:
The patent changes the wavelength parameter of the radiation by using fluorescent materials that convert VUV wavelengths to visible or near-UV wavelengths. This parameter transformation allows the radiation to pass through the viewport material more efficiently, resolving the transmission limitation without sacrificing detection capability
2Adaptability or versatility
If organic fluorescent materials such as sodium salicylate are used for VUV/EUV/X-ray sensing, then spectral range expansion is achieved, but significant aging effect occurs reducing stability
Solution Approach 1:
The patent employs composite fluorescent materials consisting of inorganic hosts (such as alkaline earth metal halides) doped with activator ions. This composite structure combines the broad VUV/EUV/X-ray absorption capability of the inorganic host with the efficient luminescence of the activator, while the inorganic framework provides superior resistance to radiation-induced aging compared to organic materials
Solution Approach 2:
The patent moves away from long-lived organic fluorescent materials that suffer from aging to inorganic phosphor materials that, while potentially having shorter operational lifetimes in some contexts, provide superior stability and resistance to radiation damage during their operational life, effectively replacing the 'short-living' organic materials with more durable inorganic alternatives
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The FNVD sensing sheet achieves high quantum yields and improved stability, enabling efficient detection of VUV/EUV/X-rays with reduced aging effects compared to organic materials, and is suitable for use in lithography applications.
Implementation Method 1
The operational principle of such a sensor is to excite the fluorescent material using VUV/EUV/X-rays so that it emits fluorescence
Implementation Method 2
when absorbing a first radiation, the FNVD sensing sheet emits a second radiation; the first radiation has a wavelength range less than 250 nm
Data Source
AI summary
The present disclosure provides a fluorescent nitrogen-vacancy diamond (FNVD) having a plurality of nitrogen-vacancy centers with a concentration about 1 ppm to 10,000 ppm. The FNVD as built-in fluorophores exhibit a nearly constant emission profile over 540 nm to 850 nm upon excitation by vacuum ultraviolet (VUV), extreme ultraviolet (EUV) and X-rays for the energy larger than 6.2 eV. Applying the FNVD sensor can measure VUV/EUV/X-rays as a sensing sheet, manufacturing method and uses thereof, sensor and lithography apparatus. The superb photostability and broad applicability of FNVDs offer a promising solution for the long-standing problem of lacking robust and reliable detectors for VUV, EUV, and X-rays.