System and tool for cleaning a glass surface of an accelerator column

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Solution Overview

Problem

The hard-to-reach glass surfaces between electrodes in accelerator columns of beamline ion implanters are difficult to clean due to their inaccessible location and small internal diameter, leading to contamination accumulation.

Innovation Solution

A cleaning tool with a shaft and a foam body having a textured surface is designed to be inserted between electrodes, allowing for rotation to effectively clean the glass surface, utilizing removable electrode inserts to create access and a modular design for varying lengths.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the accelerator column is elongated to achieve higher beam energy, then the beam energy capability is improved, but the accessibility for cleaning deteriorates

Engineering Contradiction:
Improvebeam energyVSAvoidaccessibility for cleaning
Core Design Contradiction:
TemperatureVSEase of operation

Solution Approach 1:

The cleaning tool is divided into modular segments including a shaft, foam body, and mounting bracket that can be assembled and disassembled. This segmentation allows the tool to be configured for different column lengths while maintaining cleaning effectiveness in hard-to-reach areas.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The cleaning tool transitions from attempting to clean the glass surface directly to using a foam body that can be inserted through the aperture and reach the glass surface indirectly. This dimensional approach allows cleaning of surfaces that are not directly accessible from the outside.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If the internal diameter is reduced to fit component constraints, then the apparatus design flexibility is improved, but the cleaning accessibility deteriorates

Engineering Contradiction:
Improveapparatus design flexibilityVSAvoidcleaning accessibility
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The foam body is inserted through the aperture and nested within the accelerator column structure to reach the glass surface. This nesting approach allows the cleaning tool to access internal surfaces without requiring large external dimensions, maintaining design flexibility while enabling cleaning.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Productivity

If a cleaning tool is designed to reach hard-to-access glass surfaces, then the cleaning effectiveness is improved, but the tool complexity increases

Engineering Contradiction:
Improvecleaning effectivenessVSAvoidtool complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The cleaning tool uses a segmented design with a shaft, foam body, and mounting bracket that can be independently selected and assembled. This modularity simplifies manufacturing and maintenance while achieving the capability to clean hard-to-reach surfaces.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The foam body acts as a flexible cleaning element that can deform to navigate the confined space between the aperture and glass surface. This flexibility simplifies the tool design compared to rigid mechanisms, allowing it to adapt to the internal geometry without complex joints or actuators.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The tool enables thorough cleaning of the glass surfaces, removing contamination and maintaining the accelerator column's integrity, while its modular design accommodates different column lengths and ensures convenient operation.

Implementation Method 1

An outer circumference of the foam body includes a textured cleaning surface for contacting the glass surface of the accelerator column

Methodology Applied
Scientific EffectMechanical abrasion: Abrasion

Data Source

PatentUS10780459B2System and tool for cleaning a glass surface of an accelerator column
Publication Date: 2020.09.22 VARIAN SEMICON EQUIP ASSC INC
  • US10780459B2 patent drawing
  • US10780459B2 patent drawing
  • US10780459B2 patent drawing

AI summary

A cleaning tool for cleaning a glass surface of an accelerator column is disclosed. The cleaning tool includes a shaft including a first end and a second end; a foam body located at the first end of the shaft; and a mounting bracket coupled to the first end of the shaft, the mounting bracket receiving the foam body. An outer circumference of the foam body includes a textured cleaning surface for contacting the glass surface of the accelerator column.