Foam Separator for Resist Stripping Process
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Foam formation in process solutions used for removing resist layers from substrates in photovoltaic module production leads to process interruptions and environmental pollution, as defoamers are increasingly rejected due to cost and environmental concerns.
Innovation Solution
A method and device that separate process solution into two containers with a liquid-permeable wall, allowing foam to rise and be removed into a separate foam trough, while the foam-free solution is recycled, using angled pipes and spray nozzles to minimize foam formation and facilitate its removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If defoamers are used as additives to reduce foam, then foam formation is reduced, but TOC load and COD value increase causing environmental pollution and exceeding discharge values
Solution Approach 1:
The invention extracts and separates the foam from the process solution using a foam separator device. The foam separator includes a separation chamber where foam rises to the surface and is removed separately from the liquid process solution, which then can be recycled without contamination from defoaming chemicals
Solution Approach 2:
The patent introduces an intermediary device (foam separator with liquid-permeable wall) between the process solution and the environment. This intermediary allows the foam to be captured and removed while the clean process solution is returned to the system, avoiding the need for chemical defoamers that would pollute the waste water
2Reliability
If process solution foams during pumping or spraying, then process interruptions and system malfunctions occur, but adding defoamers increases operational costs and environmental burden
Solution Approach 1:
The foam separator is integrated into the process solution circulation system to continuously separate and remove foam as the solution is pumped and sprayed. This continuous foam removal ensures uninterrupted operation without the need to stop the process for manual foam management or to deal with contaminated waste water
Solution Approach 2:
The system uses its own process solution to spray and remove foam from the surface of the collection tank, creating a self-cleaning mechanism. The sprayed liquid breaks up the foam and causes it to overflow into a separate foam collection area, eliminating the need for external defoaming chemicals
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces foam formation, allowing for continuous operation and environmentally friendly recycling of the process solution, minimizing waste and operational disruptions.
Implementation Method 1
a wall in between, which, however, is liquid-permeable due to recesses, holes, recesses or the like
Implementation Method 2
Foam can also form when the process solution is pumped around or sprayed onto the substrates
Implementation Method 3
spraying, in particular spraying with the process solution itself
Data Source
Figure 1
Figure 2
Figure 3
AI summary
In a method and a device for treating substrates, resist layers are removed from the substrate by spraying on a process solution. The process solution is first sprayed onto the substrate in a primary stripping module and then in a secondary stripping module, with the solution collecting in containers beneath the modules. Containers are provided for each module. The process solution is collected in the primary stripping module in two containers, and to this end is first directly conducted into a second container, which is largely separated from the first container by a wall, which is pervious to fluid in a region that is considerably below the surface level of the process solution. The process solution is withdrawn without foam from the first container and recirculated into the process cycle for wetting the substrates.