Foamed Inorganic Fiber Coating for Low-Particle Furnace Insulation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In the manufacturing of solar batteries, the heat insulating materials used in furnaces for Si substrates often generate particles that adhere to the substrate surfaces, leading to defective circuits due to inadequate particle suppression, which is a common issue in semiconductor and display substrate processes.
Innovation Solution
An inorganic fiber article with an inorganic coating layer having foams is developed, where the coating layer is formed on the surface of the inorganic fiber molded body, comprising amorphous materials like glass and crystalline materials such as silicon carbide, with a thickness of 0.4 to 5 mm, and containing closed pores to prevent particle generation and enhance heat insulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional heat insulating material made of inorganic fiber and binder is used in the furnace, then heat insulation is provided, but particles are generated that adhere to the Si substrate surface causing defective circuits
Solution Approach 1:
The invention converts the harmful loose fiber structure into a beneficial dense foam structure. By forming closed-cell foam pores within the heat insulating material, the structure that could potentially shed particles is transformed into a stable, particle-free insulating medium that maintains its integrity at high temperatures
Solution Approach 2:
The invention creates a composite heat insulating material combining inorganic fibers with a foam structure. This composite structure integrates the thermal insulation properties of fibers with the particle-suppressing characteristics of closed-cell foam, achieving both heat insulation and reduced particle generation
2Object-generated harmful factors
If the heat insulating material is made denser to reduce particle generation, then particle generation decreases, but heat insulation performance deteriorates
Solution Approach 1:
The invention utilizes porous foam materials with closed-cell structure as the core component of the heat insulating material. The porous structure provides excellent thermal insulation by trapping air in closed cells, while the foam matrix prevents fiber loosening and particle generation, simultaneously achieving both insulation performance and particle suppression
3Object-generated harmful factors
If a glass coating layer is applied to suppress particle generation, then particle generation is reduced, but the coating layer may crack under thermal stress
Solution Approach 1:
The invention modifies the coating layer composition by incorporating foam structures and adjusting the glass composition to include specific additives. This changes the physical parameters of the coating, creating a more flexible structure with improved thermal shock resistance that prevents cracking while maintaining particle suppression capabilities
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The inorganic fiber article effectively suppresses particle generation and improves heat insulation properties, maintaining mechanical strength and preventing cracks, thus enhancing the reliability and efficiency of the manufacturing process.
Implementation Method 1
an inorganic coating layer having foams, the inorganic coating layer formed on at least a portion of the surface of an inorganic fiber molded body
Implementation Method 2
a heat insulating material is also provided such that it surrounds the conveyer in order to reduce heat energy loss
Data Source
AI summary
The inorganic fiber article according to the present invention is an inorganic fiber article comprising an inorganic coating layer having foams, the inorganic coating layer formed on at least a portion of the surface of an inorganic fiber molded body.