Side-entry FIB Sample Holder with Orthogonal Beam Emission
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Solution Overview
Problem
Existing sample holders for focused ion beam apparatuses are complex and costly due to the requirement of multiple rotation axes and shaft bearings, making it difficult to configure micromotion devices at the tip end and limiting their application to single-side cantilever structures.
Innovation Solution
A side-entry type sample holder with a simple configuration that allows irradiation of focused ion beams from two orthogonal directions, featuring a main body with a bar shape, separated beam members, a mesh support member, and shaft members with through holes for easy FIB emission, enabling easy rotation and support of fine sample pieces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a crank mechanism with multiple rotation axes and shaft bearings is used to enable FIB emission from orthogonal directions, then the sample holder can irradiate focused ion beams from two orthogonal directions, but the structure becomes complex and manufacturing cost increases
Solution Approach 1:
The sample holder is divided into functionally independent components: a support portion for holding the sample and a beam emission portion with through holes for FIB irradiation. This segmentation allows the beam emission function to be achieved through simple geometric features (through holes) rather than complex mechanical mechanisms, resolving the contradiction between versatility and structural complexity
Solution Approach 2:
The invention extracts the essential function of FIB emission from complex mechanical mechanisms (rotation axes, shaft bearings) and implements it through simple through holes formed in the beam emission portion. This extraction eliminates unnecessary mechanical complexity while maintaining the capability to emit FIB from orthogonal directions
2Adaptability or versatility
If a crank mechanism with multiple rotation axes and shaft bearings is used, then the sample holder can rotate and emit FIB from orthogonal directions, but manufacturing cost becomes high
Solution Approach 1:
By segmenting the sample holder into support and beam emission portions with distinct functions, the invention simplifies the manufacturing process. The beam emission portion can be manufactured with simple through holes using standard machining techniques, avoiding the need for complex mechanical assemblies and reducing manufacturing cost
Solution Approach 2:
The invention extracts the FIB emission function from complex mechanical mechanisms and implements it through simple through holes. This extraction significantly reduces manufacturing complexity and cost while maintaining the versatility of emitting FIB from orthogonal directions
3Adaptability or versatility
If a crank mechanism is formed at the tip end portion, then the sample holder can emit FIB from orthogonal directions, but configuring micromotion device at tip end side becomes difficult
Solution Approach 1:
The invention separates the micromotion device configuration from the tip end portion by implementing FIB emission through through holes in the beam emission portion. This segmentation allows micromotion devices to be easily configured at the tip end without interfering with the FIB emission mechanism, resolving the contradiction between versatility and ease of operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient thickness processing of fine sample pieces for TEM observation by allowing FIB irradiation from orthogonal directions, reducing manufacturing complexity and cost while maintaining compatibility with both cantilever and non-cantilever stages.
Implementation Method 1
a through hole formed in the mesh support member and at least one of the shaft members, the through hole penetrating a space between the opening portion and a shaft end surface of the at least one of the shaft members in the z-axis direction for introducing a focused ion beam toward the fine sample piece
Data Source
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AI summary
Shaft members (26A, 26B) which respectively protrude toward at least one beam member (23A, 23B) and the other beam member (23B, 23A) in a z-axis direction are formed in a mesh support member (24). A through hole (43) for penetrating a space between a shaft end surface and an opening portion in the z-axis direction and introducing a focused ion beam toward a fine sample piece is formed in at least one shaft member.