Focus Ring Thermal Imaging for Heat Transfer Bond Inspection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing techniques face challenges in uniformly controlling the temperature of a focus ring and its heat transfer member during plasma etching processes, leading to variations in etching rates and pattern line widths due to inefficient heat transfer and lack of independent inspection methods for temperature gradients and adhesion states.
Innovation Solution
A focus ring inspection system utilizing a housing with a transparent upper wall, a hot plate for heating the focus ring, and an inspection unit with an infrared camera to obtain thermal images and assess the connection state between the focus ring and the heat transfer member, enabling the identification of temperature gradients and adhesion issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If a heat transfer member is placed between the electrostatic chuck and the focus ring to improve heat transfer efficiency, then heat transfer efficiency is improved, but temperature gradient control becomes difficult due to varying adhesion states
Solution Approach 1:
The patent replaces mechanical contact-based heat transfer assessment with infrared thermal imaging to non-contactly measure temperature distribution. This substitution allows precise measurement of temperature gradients without being affected by adhesion state variations, resolving the contradiction between improving heat transfer efficiency and maintaining temperature gradient control.
Solution Approach 2:
The patent introduces an intermediary substance (infrared-absorbing material) applied to the focus ring surface to enhance infrared signal absorption and improve thermal image quality. This intermediary enables more accurate temperature measurement while maintaining the original heat transfer mechanism through the heat transfer member.
2Productivity
If the focus ring is directly exposed to plasma for etching, then etching process is effective, but temperature rise of the focus ring becomes difficult to control
Solution Approach 1:
The patent implements a feedback system where infrared thermal images are captured during plasma etching, temperature distribution is analyzed, and the plasma process parameters are adjusted accordingly. This closed-loop feedback enables effective etching while maintaining precise temperature control of the focus ring by continuously monitoring and adjusting based on real-time temperature data.
Solution Approach 2:
The patent applies preliminary actions by pre-heating the focus ring to a target temperature before plasma etching begins, and pre-applying infrared-absorbing material to ensure optimal thermal imaging conditions. These preliminary actions establish controlled initial conditions that prevent excessive temperature rise during the etching process.
3Measurement precision
If thermal imaging is performed to inspect temperature distribution, then temperature gradient inspection is enabled, but inspection system complexity increases
Solution Approach 1:
The patent designs the inspection system to serve multiple functions: it not only measures temperature distribution but also assesses adhesion quality of the heat transfer member and monitors focus ring condition. By consolidating these inspection functions into a single integrated system, the patent reduces overall system complexity while maintaining high measurement precision through multi-purpose utilization of the infrared imaging capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system allows for precise inspection of minute thermal gradients and adhesion states, preventing process defects by ensuring uniform heat distribution and improving heat transfer efficiency, thus enhancing the consistency of etching processes.
Implementation Method 1
an inspection unit configured to inspect a connection state between the focus ring and the heat transfer member by obtaining a thermal image of the focus ring
Implementation Method 2
a hot plate provided in the inspection space and configured to heat treat the focus ring while the hot plate supports the focus ring
Data Source
AI summary
Proposed is an inspection technology for inspecting a focus ring. A device and a method for inspecting the focus ring including a heat transfer member are proposed. The inspection device may include a housing configured to provide inspection space of the focus ring, with a predetermined area of an upper wall of the housing being formed of a transparent material, a hot plate provided in the housing and configured to heat treat the focus ring while the hot plate supports the focus ring, and an inspection unit configured to inspect a connection state between the focus ring and the heat transfer member by obtaining a thermal image of the focus ring after the focus ring is completely heat treated.