Focus Ring Lift Pin Assembly for Clean In-Chamber Transfer
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Solution Overview
Problem
The existing method for replacing focus rings in substrate treating apparatuses is labor-intensive and prone to introducing particles into the process chamber, necessitating a more efficient and particle-free transfer method.
Innovation Solution
A substrate support unit and a ring transfer method that utilize a ring lift pin assembly with a first pin and a second pin, driven by a driving unit, to lift and lower the focus rings, allowing for convenient and minimally invasive transfer within the process chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a transfer robot is used to take out the used focus ring and introduce a new focus ring, then particle introduction is reduced, but the transfer process becomes more complex and time-consuming
Solution Approach 1:
The invention extracts the focus ring transfer function from the substrate transfer robot, creating a dedicated ring transfer mechanism integrated into the substrate support unit. This separate mechanism uses a ring carrier and transfer arm to handle focus rings independently, preventing particle contamination while simplifying the overall transfer process by assigning specific functions to specific components.
Solution Approach 2:
The invention introduces a ring carrier as an intermediary component between the substrate support unit and the focus ring storage. The ring carrier holds multiple focus rings and interfaces with the transfer arm, enabling controlled transfer of focus rings without direct contact between the robot and focus rings, thus reducing particle introduction risk.
2Productivity
If multiple focus rings are provided for replacement, then operational continuity is improved, but the structure becomes more complex and process chamber height increases
Solution Approach 1:
The invention implements a nested structure where multiple focus rings are stacked vertically on a single ring carrier. The carrier includes multiple levels or positions that can hold different focus rings, allowing several rings to be stored in a compact vertical arrangement within the process chamber without increasing the horizontal footprint or requiring multiple separate storage locations.
Solution Approach 2:
The ring carrier is designed as a universal component that can hold and transfer multiple different focus rings. The transfer mechanism interfaces with the carrier in a standardized way, allowing any focus ring stored on the carrier to be transferred to the substrate support unit, eliminating the need for separate transfer mechanisms for each ring.
3Device complexity
If manual replacement by operator is used, then device complexity is minimized, but particle introduction risk and time consumption increase significantly
Solution Approach 1:
The invention implements an automated self-service transfer system where the focus ring replacement is performed by the apparatus itself without operator intervention. The transfer arm automatically retrieves focus rings from the ring carrier and installs them on the substrate support unit based on process requirements, eliminating the need for operators to manually handle focus rings inside the process chamber and thus preventing particle contamination.
4Device complexity
If focus ring transfer is integrated into substrate transfer robot, then device complexity is reduced, but substrate treatment precision may be compromised
Solution Approach 1:
The invention segments the transfer functions into two independent systems: one for substrate transfer and another for focus ring transfer. The substrate transfer robot handles only substrates, while a dedicated transfer arm integrated into the substrate support unit handles focus rings. This segmentation ensures that substrate transfer precision is not compromised by focus ring handling operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution enables convenient transfer of multiple focus rings, minimizing the height of the process chamber and reducing the risk of particle introduction, thereby improving operational efficiency and cleanliness.
Implementation Method 1
The support assembly includes an electrostatic chuck fixing the substrate by an electrostatic force
Implementation Method 2
The plasma is produced by a very high temperatures, a strong electric field, or a high frequency electromagnetic field (RF electromagnetic field)
Implementation Method 3
The plasma is produced by a very high temperatures, a strong electric field, or a high frequency electromagnetic field (RF electromagnetic field)
Implementation Method 4
a ring lift pin assembly for lifting and lowering the first ring and the second ring
Data Source
AI summary
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a process chamber having a treating space therein; a substrate support unit configured to support a substrate in the treating space; a gas supply unit configured to supply a process gas to the treating space; and a plasma source for generating a plasma from the process gas, and wherein the substrate support unit includes: a support plate on which the substrate is placed; a base which is positioned below the support plate; a first ring provided to surround the substrate placed on the support unit; a second ring provided below the first ring and having a through hole; and a ring lift pin assembly for lifting and lowering the first ring and the second ring, and wherein the ring lift pin assembly includes: a first pin provided to be inserted into the through hole and to lift and lower the first ring; a second pin in a hollow shaft shape to lift and lower the second ring and having a hole at which first pin passes through within; and a driving unit for driving the first pin and the second pin, and wherein the through hole overlaps the first ring when seen from above.