Unified Focus Ring Lifting for Simpler Plasma Etching Replacement
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Solution Overview
Problem
Existing focus ring replacement devices in plasma etching apparatuses have complex structures due to standalone driving mechanisms for the focus ring, leading to increased costs and operational complexity.
Innovation Solution
A focus ring replacement device with a unified driving mechanism that integrates a pin lifting mechanism and a focus ring lifting mechanism, utilizing a driving device to control both mechanisms simultaneously, simplifying the structure and reducing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a standalone driving device is used for the focus ring lifting mechanism, then the focus ring can be lifted and replaced, but the structure becomes complicated and device cost increases
Solution Approach 1:
The patent combines the focus ring lifting mechanism with the existing pin lifting mechanism by integrating the driving device. The driving device originally designed for pin lifting is extended to also control the focus ring lifting through linkage members, merging two previously separate functions into one unified mechanism, thereby reducing structural complexity while maintaining reliability
Solution Approach 2:
The driving device is designed to perform multiple functions: it can lift and lower both the pin lifting mechanism and the focus ring lifting mechanism. This multi-functional design eliminates the need for a dedicated standalone driving device for the focus ring, simplifying the overall structure and reducing device cost
2Reliability
If a standalone driving device is used for the focus ring lifting mechanism, then the focus ring can be lifted and replaced, but device cost increases
Solution Approach 1:
By merging the focus ring lifting function with the existing pin lifting driving device, the patent eliminates the need to manufacture and install a separate standalone driving device. This consolidation reduces material costs, manufacturing complexity, and overall device cost while maintaining the necessary functionality for focus ring replacement
3Device complexity
If a unified driving mechanism is used for both pin lifting and focus ring lifting, then structure is simplified and cost is reduced, but operational interference may occur
Solution Approach 1:
The unified driving device is segmented into separate output ends, each connected to different linkage members. One output end controls the pin lifting mechanism while the other controls the focus ring lifting mechanism. This segmentation allows independent control of each function while using a single driving device, maintaining operational independence despite structural simplification
Data Source
Figure 1
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Figure 4~5(c)
AI summary
A focusing ring replacement device, comprising a driving device (30), an ejector pin lifting mechanism (10), and a focusing ring lifting mechanism (20). The ejector pin lifting mechanism (10) comprises a first ejector pin (11) and a first linkage member (12), and the first ejector pin (11) is arranged at the top of the first linkage member (12) and can extend out through a through hole in an edge ring (50); and the focusing ring lifting mechanism (20) comprises a second ejector pin (21) and a second linkage member (22), and the second ejector pin (21) is arranged at the top of the second linkage member (22) and can extend out through a through hole of a base (40). The driving device (30) is fixedly arranged below a lower electrode (70), and an output end thereof is respectively connected to the first linkage member (12) and the second linkage member (22), so as to respectively drive the first ejector pin (11) of the ejector pin lifting mechanism (10) and the second ejector pin (21) of the focusing ring lifting mechanism (20) to ascend and descend, thereby simplifying the configuration of the structure and reasonably reducing the device costs.