Focus Ring Transfer System with In-Chamber Positioning
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Solution Overview
Problem
Existing semiconductor manufacturing processes face challenges in accurately transferring and positioning focus rings within a processing chamber without exposing the chamber to the atmosphere, which can lead to inaccuracies and complications in maintaining optimal positional relationships between the focus ring and the electrostatic chuck.
Innovation Solution
A transfer method and system that utilize a measuring instrument with sensors to acquire deviation measurements between the focus ring, the measuring instrument, and the electrostatic chuck, allowing for precise adjustment of the focus ring's position to align the central positions of the focus ring and the electrostatic chuck, ensuring accurate transfer and operation within the chamber without opening it to the atmosphere.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the chamber is opened to the atmosphere for focus ring replacement, then the focus ring can be easily accessed and replaced, but the chamber exposure to atmosphere causes inaccuracies and complications in maintaining optimal positional relationships
Solution Approach 1:
The patent maintains a vacuum or controlled atmosphere within the processing chamber during focus ring replacement, preventing atmospheric exposure that would cause positioning inaccuracies. The transfer mechanism operates entirely within the sealed chamber environment, preserving the inert atmosphere while enabling focus ring replacement.
Solution Approach 2:
The patent introduces a transfer mechanism as an intermediary device that can grasp and reposition the focus ring without requiring chamber opening. This intermediary tool enables focus ring replacement while maintaining the sealed chamber environment and optimal positional relationships.
2Manufacturing precision
If the chamber remains sealed during focus ring transfer, then positional accuracy is maintained, but the transfer process becomes more complex and requires specialized transfer mechanisms
Solution Approach 1:
The transfer mechanism is designed with multi-functionality, serving both as a transport device and a positioning device. It can grasp the focus ring, transfer it within the chamber, and adjust its position relative to the electrostatic chuck, eliminating the need for separate specialized devices.
Solution Approach 2:
The patent combines the transfer function and positioning function into a single integrated mechanism. The transfer mechanism includes positioning capabilities that allow it to place the focus ring at the correct location on the electrostatic chuck without requiring additional separate positioning equipment.
3Ease of manufacture
If manual focus ring replacement is used, then the process is simple, but productivity and operational efficiency are reduced
Solution Approach 1:
The transfer mechanism is designed to autonomously grasp, transfer, and position the focus ring without requiring manual intervention. The system performs the replacement operation automatically, improving productivity while maintaining operational simplicity through automated control.
Solution Approach 2:
The patent employs automated control systems that accelerate the focus ring replacement process, transforming it from a slow manual operation to a rapid automated process. The control system coordinates the transfer mechanism's movements to complete the replacement efficiently.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enables high-accuracy transfer and positioning of focus rings, improving the stability and productivity of semiconductor manufacturing by maintaining optimal positional relationships without exposing the chamber to the atmosphere, thus simplifying the replacement process and enhancing operational efficiency.
Implementation Method 1
a stage including an electrostatic chuck provided in the chamber provided by the chamber body
Data Source
AI summary
A transfer method according to an exemplary embodiment includes: transferring a focus ring onto a stage by a transfer unit; transferring a measuring instrument into an inner region of the transferred focus ring and onto an electrostatic chuck; acquiring a measurement value group by the transferred measuring instrument; and adjusting a transfer position of the focus ring by the transfer unit such that the central position of the electrostatic chuck and the central position of the focus ring coincide with each other based on the measurement value group.