Focus Ring Wear Measurement Using Horizontal Light Detection
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Solution Overview
Problem
Existing methods for measuring the wear of consumable components like focus rings in plasma etching processes are inaccurate and can damage the components due to direct physical contact, making it difficult to determine when replacement is necessary.
Innovation Solution
A substrate treating apparatus with a measurement unit that uses a light receiving member to measure wear by detecting interference with emitted light, allowing for precise calculation of wear based on changes in light reception.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a measuring instrument is brought into direct contact with the focus ring to measure wear, then the degree of wear can be identified, but the focus ring may be damaged by physical contact
Solution Approach 1:
The patent replaces the mechanical contact measurement system with an optical measurement system. A light source emits light toward the focus ring, and a light receiving member detects the reflected or transmitted light. The wear amount is calculated based on changes in light intensity or pattern, eliminating physical contact between the measuring instrument and the focus ring while maintaining measurement accuracy.
Solution Approach 2:
The patent introduces light as an intermediary medium between the measurement system and the focus ring. Instead of direct mechanical contact, the measurement is performed by analyzing how light interacts with the focus ring's surface, allowing wear detection without transferring mechanical forces that could damage the component.
2Measurement precision
If an operator directly opens the process chamber to identify wear, then the degree of wear can be visually inspected, but it is difficult to appropriately identify wear at the required time and increases operational complexity
Solution Approach 1:
The measurement system is integrated into the existing process chamber, allowing the focus ring to be measured automatically during or between processing cycles without requiring the chamber to be opened. The system uses built-in light sources and sensors to perform self-diagnosis of the focus ring's wear state, eliminating the need for manual inspection and reducing operational complexity.
Solution Approach 2:
The patent implements a feedback mechanism where the light receiving member continuously monitors the focus ring's condition and provides real-time data to a control system. This allows for automatic detection of wear thresholds and triggers alerts or automated replacement decisions, simplifying the operational process while maintaining high measurement accuracy.
3Measurement precision
If the focus ring is replaced based on predetermined number of substrates or allowable shape deviation, then replacement timing can be determined, but it may not accurately reflect actual wear conditions and leads to unnecessary replacements or missed replacement opportunities
Solution Approach 1:
The patent replaces indirect estimation methods (based on substrate count or shape deviation thresholds) with direct optical measurement of the focus ring's actual wear state. By measuring physical dimensions or surface characteristics through light interaction, the system provides accurate real-time wear data, enabling precise determination of replacement timing and optimizing the balance between component utilization and performance maintenance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and non-destructive measurement of consumable component wear, ensuring timely replacement and maintaining process consistency.
Implementation Method 1
a measurement unit that measures a degree of wear of the consumable component and has a light receiving member that receives light emitted in a horizontal direction
Data Source
AI summary
An apparatus for treating a substrate includes a process chamber having a process space, a support unit that supports the substrate in the process space, a lift pin module having a lift pin that moves a consumable component on the support unit in an up/down direction, and a measurement unit that measures a degree of wear of the consumable component and has a light receiving member that receives light emitted in a horizontal direction.