Focused X-Ray Beam Co-Localization With Optical Microscopy
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Solution Overview
Problem
Existing x-ray microprobes face challenges in registering a small focused x-ray beam with an optical image with high positional accuracy over an extended time due to mechanical registration errors and thermal/vibrational drift, particularly for beams smaller than 30 microns FWHM.
Innovation Solution
An apparatus is designed with an x-ray optic system and a microscope that co-localize their fields-of-view, using x-ray optics with a longer working distance and a microscope objective aligned within the depth-of-focus of the x-ray beam, allowing for simultaneous co-localization and alignment compensation for thermal changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a focused x-ray beam with small spot size is used to improve analysis precision, then measurement precision is improved, but registration stability deteriorates due to mechanical motion errors and thermal drift
Solution Approach 1:
The patent replaces the mechanical motion system used for registering x-ray and optical images with an optical field-based alignment system. By using a light microscope with an objective lens to define the field of view and aligning it with the x-ray beam path, the system achieves registration without relying on mechanical motions, thereby eliminating mechanical errors and thermal drift while maintaining sub-4000 nm positional accuracy
Solution Approach 2:
The patent creates a unified measurement system where a single optical field of view serves dual purposes: it provides both the alignment reference and the measurement field for the x-ray beam. The microscope objective's field of view is designed to encompass the entire x-ray beam interaction region, allowing the same optical path to guide both alignment and measurement functions, thereby improving registration stability without sacrificing precision
2Measurement precision
If the x-ray beam spot size is reduced to improve analysis capability, then measurement precision is improved, but the depth-of-focus becomes smaller making alignment more difficult
Solution Approach 1:
The patent extends the effective depth-of-focus by utilizing the third dimension (depth) of the optical field. By designing the microscope objective's field of view to have a depth range equal to ten times the x-ray beam's depth-of-focus, the system creates a volumetric alignment zone where the x-ray beam remains aligned over an extended depth range, thereby reducing alignment difficulty while maintaining small spot size precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Achieves stable and accurate registration of the focused x-ray beam with the optical image, reducing registration errors and maintaining alignment over time, even for small beams.
Implementation Method 1
an x-ray optic system configured to receive x-rays from an x-ray source, to focus at least some of the x-rays to form a focused x-ray beam
Implementation Method 2
a microscope comprising an objective configured to receive and focus light from the portion of the sample
Data Source
AI summary
An apparatus includes an x-ray optic system configured to receive x-rays from an x-ray source, to focus at least some of the x-rays to form a focused x-ray beam, and to irradiate a portion of a sample with the focused x-ray beam. The focused x-ray beam has a depth-of-focus and a focused x-ray spot at the sample. The apparatus further includes a microscope having an objective configured to receive and focus light from the portion of the sample. The objective has an object plane and a field-of-view. The object plane is within a range centered on the depth-of-focus of the focused x-ray beam, the range having a width ten times the depth-of-focus, and the focused x-ray spot is within the field-of-view of the objective.