Focusing Piezoelectric IDT Layout for High-Frequency Impedance Matching

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Solution Overview

Problem

Existing RF piezoelectric transducers face challenges in impedance matching at high frequencies, leading to significant insertion loss due to their large size and inefficiencies in exciting wavelength-scale devices, as straight interdigital transducers (IDTs) are not compatible with wavelength-scale features and result in excessive power spread and mode mismatch.

Innovation Solution

A focusing transducer design with multiple arced fingers on both the front and back surfaces of a piezoelectric layer, optimized for specific frequency and wavelength requirements, which employs both lateral and vertical electric fields to excite Lame modes, improving impedance matching and reducing parasitic capacitance, and uses phononic reflectors to maximize coupling into desired modes while minimizing coupling into undesired modes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If straight interdigital transducers (IDTs) are used for impedance matching, then impedance matching is optimized, but the transducer dimensions become much larger than wavelength scale, resulting in significant insertion loss

Engineering Contradiction:
Improveimpedance matchingVSAvoidinsertion loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent applies curvature to the IDT fingers by arranging them in an arc rather than straight lines. This curved geometry focuses the acoustic energy into a smaller area, enabling wavelength-scale device dimensions while maintaining effective impedance matching. The arc-shaped finger arrangement creates a focal point that concentrates acoustic power, resolving the contradiction between large transducer size for impedance matching and small size for reducing insertion loss.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Ease of operation

If straight IDTs are used to produce Lamb waves, then straight crested waves are generated, but mode mismatch occurs with wavelength-scale phononic devices, leading to large insertion loss

Engineering Contradiction:
Improvewave generationVSAvoidinsertion loss
Core Design Contradiction:
Ease of operationVSLoss of energy

Solution Approach 1:

The curved/arc-shaped IDT finger arrangement transforms the wave generation pattern from straight crested Lamb waves to focused Lame waves. The curvature of the fingers creates a focal point that concentrates acoustic energy, producing wave modes that are compatible with wavelength-scale phononic devices. This resolves the mode mismatch issue while maintaining ease of wave generation.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Solution Approach 2:

The patent changes the geometric parameters of the IDT from straight to curved/arc-shaped fingers. This parameter change fundamentally alters the wave generation characteristics, transforming the acoustic mode from Lamb waves to Lame waves, which are better matched to wavelength-scale devices and reduce insertion loss.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the IDT beam waist is kept large for optimal impedance matching, then matching to 50Ω line is achieved, but the power is spread over a large area, increasing insertion loss

Engineering Contradiction:
Improveimpedance matchingVSAvoidpower distribution area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The arc-shaped IDT fingers create a focal point that concentrates acoustic power into a small area rather than spreading it over a large region. The curved geometry naturally focuses the acoustic energy, enabling both good impedance matching and compact power distribution, thus resolving the contradiction between large beam waist for matching and small area for reducing loss.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The focusing transducer achieves higher coupling efficiency (up to 7%) compared to traditional Lamb mode devices, reduces insertion loss, and allows for a more compact device design by optimizing the number of arced fingers, thereby enhancing impedance matching and reducing excess losses.

Implementation Method 1

A focusing transducer design with multiple arced fingers on both the front and back surfaces of a piezoelectric layer, optimized for specific frequency and wavelength requirements, which employs both lateral and vertical electric fields to excite Lame modes

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS10979018B1Focusing transformers/filters in isotropic/anisotropic piezoelectrics
Publication Date: 2021.04.13 NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLC
  • US10979018B1 patent drawing
  • US10979018B1 patent drawing
  • US10979018B1 patent drawing

AI summary

A focusing interdigital transducer (IDT) and corresponding single- and dual-port piezoelectric devices are disclosed. The focusing interdigital transducer, which generates Lamé acoustic waves, permits operation at significantly higher frequencies than those possible with traditional IDTs. The focusing IDT employs multiple arced fingers formed both above and below the piezoelectric layer to improve coupling efficiency by coupling through both the e31 and e33 piezoelectric coefficients to the piezoelectric layer. By optimizing both anchor design and location, acoustic wave losses are minimized, thereby improving the device's quality factor Q. Through proper bus design and selection of the number of IDT fingers, a device's impedance can be tuned for a given application. The focusing IDTs may be used in single-port filter devices and dual-port transformer devices. The single- and dual-port devices may operate at a single frequency, at two frequencies, or over a band of frequencies.