Focusing Optical Element Characterization With Scattered Reference Waves
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Solution Overview
Problem
Existing methods for characterizing optical elements, such as microscope objective lenses, require an aberration-free reference optical element, which is challenging to achieve, especially in modern technologies demanding miniaturization and increasing resolution, and this limitation complicates the measurement of optical aberrations.
Innovation Solution
A method and system that utilize a scattering element, such as a nanoparticle, to generate a scattered reference wave after the focal plane, allowing characterization of optical elements without the need for an aberration-free reference, by collecting and detecting both the focused light beam and the scattered reference wave to determine the influence of the optical element on the wave front.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If interferometry with a reference optical element is used to characterize wave front aberrations, then measurement accuracy can be improved, but the requirement for an aberration-free reference element becomes increasingly difficult to achieve with miniaturization and increasing resolution
Solution Approach 1:
The patent introduces a scattering element as an intermediary that generates a reference wave through scattering rather than requiring a traditional reference optical element. The scattering element converts the incident wave into a scattered reference wave that can be used for interferometric measurement, eliminating the need for manufacturing an aberration-free reference element while maintaining measurement accuracy
Solution Approach 2:
The patent creates a virtual copy of the reference wave through scattering rather than using a physical reference optical element. The scattered reference wave replicates the necessary reference function without requiring the complex fabrication of an actual reference element, thus solving the manufacturing difficulty while preserving measurement capability
2Reliability
If a traditional reference optical element is used for wave front measurement, then a well-defined reference wave can be obtained, but the system complexity and cost increase due to the need for calibrated reference elements
Solution Approach 1:
The scattering element serves itself to generate the reference wave without requiring external calibration or complex setup. The scattered reference wave is automatically produced by the scattering element when illuminated by the incident wave, eliminating the need for manual calibration procedures and reducing system complexity while maintaining reliable reference wave generation
Solution Approach 2:
The patent replaces expensive, carefully calibrated reference optical elements with a simple scattering element that can be a small nanoparticle or scatterer. This substitute is much simpler and cheaper to implement, and while the scattered reference wave has different characteristics, it provides sufficient reliability for wave front characterization without the high cost and complexity of traditional reference elements
3Measurement precision
If an aberration-free reference optical element is required for accurate measurement, then measurement accuracy is maintained, but the problem transfers to characterizing the reference element itself which also requires another reference
Solution Approach 1:
The patent inverts the traditional approach by not requiring a reference element to define the reference wave, but instead using a scattering element to generate the reference wave through scattering. This inversion eliminates the recursive problem of needing to characterize the reference element itself, as the scattering element's properties are inherently accounted for in the measurement process rather than requiring separate calibration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate characterization of optical elements by eliminating the need for an aberration-free reference, reducing system complexity and cost, and facilitating adaptation to individual measurement requirements, while providing a well-defined reference wave for comparison.
Implementation Method 1
providing a scattering element, in particular comprising or consisting of a nanoparticle, between the focusing optical element and the beam collection assembly such that the light beam generates a scattered reference wave
Data Source
Figure 1
Figure 2A~2B
Figure 3(a)~3(d)
AI summary
The invention relates to a method for characterizing a focusing optical element (12). The method comprises transmitting a light beam (100) through the focusing optical element (12) such that the light beam (100) is focused at a focal plane (1000) by the focusing optical element (12), and collecting the focused light beam (100) after the focal plane (1000) by a beam collection assembly (14) and detecting the collected light beam (100) by an image detector (16). The method further comprises providing a scattering element (24) between the focusing optical element (12) and the beam collection assembly (14) such that the light beam (100) generates a scattered reference wave (26), collecting the focused light beam (100) and at least a part of the scattered reference wave (26) after the focal plane (1000) by the beam collection assembly (14) and detecting the collected light beam (100) and the collected reference wave (26) by the image detector (16), wherein the detected light beam (100) and the detected scattered reference wave (26) partly overlap with each other at the image detector (16). Moreover, the method comprises determining an influence of the focusing optical element (12) on a wave front of the transmitted light beam (100) based on the detected light beam (100) and the detected scattered reference wave (26). The invention further relates to a system (10) and a use of a system for characterizing a focusing optical element (12) and a method for characterizing a scattering element (24).