Fold Mirror Illumination for Compact Metrology
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Solution Overview
Problem
Current metrology systems face challenges in efficiently measuring waveguides for image quality standards, particularly in achieving compact designs that can effectively measure multiple metrics.
Innovation Solution
The implementation of compact metrology systems that utilize mirror folded illumination to measure a plurality of metrics, where one or more fold mirrors are used to reduce the distance between the light engine and reflection detector, allowing for a more compact footprint.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If traditional illumination paths are used in metrology systems, then the system can measure waveguide metrics, but the system size becomes large and complex
Solution Approach 1:
The patent introduces a fold mirror to change the spatial dimension of the illumination path. Instead of a straight linear path, the light beam is folded at an angle (e.g., 45 degrees) to redirect the illumination path in a different spatial direction, effectively reducing the footprint of the system while maintaining the required optical path length for measurement
Solution Approach 2:
The fold mirror is positioned within the body of the metrology system, nested between the light source and the stage assembly. This allows the illumination optics to be compactly arranged within the existing system volume, reducing the overall system size without compromising measurement capabilities
2Area of stationary object
If the distance between light engine and detector is reduced for compact design, then system footprint decreases, but optical path alignment becomes more challenging
Solution Approach 1:
The fold mirror acts as an intermediary optical element that mediates between the light source and the stage/detector assembly. It provides a controlled reflection point that maintains precise optical path geometry while allowing compact physical arrangement, thus simplifying alignment compared to direct short-distance positioning
3Productivity
If multiple metrics are measured simultaneously, then productivity increases, but system complexity increases
Solution Approach 1:
The folded illumination system provides a universal measurement platform where the same compact optical path can measure multiple waveguide metrics (angular uniformity, contrast, efficiency, etc.) by varying measurement parameters rather than requiring separate dedicated systems for each metric, thus achieving multi-functionality without proportional complexity increase
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the measurement of various metrics such as angular uniformity, contrast, efficiency, and others with increased throughput, while also reducing the system's size and improving operational efficiency.
Implementation Method 1
a fold mirror angled relative to the light source, the fold mirror is configured to turn the light beam toward the stage
Data Source
AI summary
Embodiments of the present disclosure generally relate to metrology systems and metrology methods to measure waveguides for image quality standards. In at least one embodiment, an optical device metrology system includes a stage, a body, and a light engine positioned within the body and mounted above the stage. The light engine includes, a light source, a fold mirror angled relative to the light source, the fold mirror is configured to turn a light beam toward the stage, one or more lenses or arrays positioned between the fold mirror and the stage, and a projection lens positioned between the one or more lenses or arrays and the stage. The system further includes, a first detector positioned within the body and mounted above the stage adjacent to the light engine configured to receive the projected light beam projected upwardly from the stage.