Foldable Transfer Robot Layout for Compact Substrate Tools
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Solution Overview
Problem
Substrate processing systems face challenges in maximizing tool density due to constrained dimensions and configurations, leading to inefficient use of space and reduced processing capacity within fabrication rooms.
Innovation Solution
The implementation of a modified atmosphere-to-vacuum transfer module with a transfer robot assembly that allows load locks to be partially or fully located within the equipment front end module, reducing the overall footprint and increasing pitch, thereby enabling closer placement of substrate processing tools and increasing the number of process modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If load locks are arranged outside the equipment front end module, then the transfer robot assembly has sufficient space to operate, but the overall footprint of the substrate processing tool increases
Solution Approach 1:
The load locks are nested within the interior volume of the equipment front end module (EFEM), with at least approximately 30-70% of the load lock volume located inside the EFEM boundaries. This nesting arrangement reduces the overall footprint of the substrate processing tool while the transfer robot assembly is configured to access both the loading stations and the nested load locks through coordinated arm movements
Solution Approach 2:
The transfer robot assembly utilizes vertical dimension by arranging loading stations and load locks at different heights, with loading stations positioned above load locks. The robot arms can extend vertically and horizontally to access components in three-dimensional space, allowing compact horizontal footprint while maintaining adequate operational space
2Productivity
If the number of process modules is increased, then processing capacity is improved, but the tool footprint increases
Solution Approach 1:
Process modules are arranged in a vertically stacked configuration rather than only horizontally, with multiple process modules positioned at different heights. The transfer robot assembly includes vertically extending arms that can access process modules on multiple levels, enabling increased processing capacity within a compact horizontal footprint
Solution Approach 2:
The EFEM is configured to contain nested components including load locks positioned within its interior volume, and the overall tool design nests the EFEM within the larger substrate processing tool structure. This nested arrangement maximizes space utilization and allows more process modules to be packed into the available volume
3Area of stationary object
If loading stations and load locks are arranged in vertically stacked configuration, then space utilization is improved, but the transfer robot assembly complexity increases
Solution Approach 1:
The transfer robot assembly includes arms with adjustable and extendable configurations that can dynamically adapt to access loading stations and load locks at different vertical positions. The robot platform can raise and lower the robot arms, and the arm segments can extend or retract, providing dynamic adaptability to the vertically stacked configuration without requiring a completely complex fixed structure
Data Source
AI summary
A transfer robot assembly arranged within an ATV transfer module includes a transfer robot that includes an end effector and one or more arm segments connected between the end effector and a transfer robot platform. A first robot alignment arm is connected to the transfer robot platform. A second robot alignment arm is connected to the first robot alignment arm and to a mounting chassis of the ATV transfer module. The transfer robot assembly is configured to actuate the first robot alignment arm and the second robot alignment arm to raise and lower the transfer robot to adjust a position of the transfer robot in a vertical direction and in a horizontal direction. The transfer robot is configured to fold into a folded configuration having a narrow profile occupying less than 50% of an overall depth of the ATV transfer module.