Folded MEMS Transducer Membranes Without Complex Etching
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Solution Overview
Problem
Existing methods for producing MEMS transducers with folded membranes are complex, costly, and inefficient, particularly due to the need for multiple etching processes and large space requirements, limiting their scalability and acoustic performance.
Innovation Solution
A method involving a shaping component coated with a membrane layer system, which is then structured and completely removed, allowing the membrane to be attached to a carrier without the need for complex etching, enabling efficient production of compact MEMS transducers with improved acoustic properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If multiple etching processes are used to produce folded membranes, then the membrane structure can be formed, but the production process becomes complex and costly
Solution Approach 1:
The patent applies preliminary action by forming the folded membrane structure during the coating process itself, rather than requiring subsequent etching steps. The membrane layer system is deposited in a folded configuration directly onto the carrier, eliminating the need for complex multi-step etching processes to create the folded geometry.
Solution Approach 2:
The patent replaces the mechanical/chemical etching system with a deposition-based system. Instead of using etching processes to remove material and create folded structures, the membrane layer system is deposited in its final folded configuration, substituting a simpler coating process for a complex multi-step etching sequence.
2Ease of manufacture
If external carriers are used to support the membrane during production, then the membrane can be manufactured, but the device complexity and production costs increase
Solution Approach 1:
The patent merges the carrier function with the membrane structure itself. The carrier is designed to be completely removed after the membrane layer system is deposited, meaning the carrier structure is integrated into the manufacturing process but does not remain as a separate permanent component. This eliminates the need for complex external carrier structures in the final device.
Solution Approach 2:
The patent applies the extraction principle by removing the carrier completely after serving its temporary purpose during manufacturing. The carrier is extracted from the final device structure, leaving only the membrane layer system that was deposited upon it. This eliminates the complexity of permanent carrier structures while still enabling easy membrane manufacturing during the process.
3Ease of manufacture
If large space is allocated for carrier structures, then the membrane can be supported, but the compactness and scalability of MEMS transducers are reduced
Solution Approach 1:
The patent uses preliminary action by providing a temporary carrier structure that is completely removed after the membrane layer system is deposited. This allows the membrane to be supported during manufacturing without requiring permanent large-scale carrier structures, thereby maintaining compactness and improving scalability for mass production.
Solution Approach 2:
The patent employs the disposable carrier approach where the carrier structure is used temporarily during manufacturing and then completely removed. This short-living carrier eliminates the need for permanent large-scale support structures, reducing the space required in the final device and improving scalability for producing multiple compact MEMS transducers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method simplifies the production process, reduces costs, and allows for higher yields of compact MEMS transducers with enhanced sound power and audio quality by eliminating the need for external carriers and complex etching, while maintaining high process efficiency and scalability.
Implementation Method 1
coating the shaping component with a membrane layer system
Implementation Method 2
the membrane comprises at least one actuator layer comprising an actuator material... such that the vertical sections can be induced to vibrate horizontally by actuation of the at least one electrode
Implementation Method 3
complete removal of the shaping component
Data Source
AI summary
The invention preferably relates to a method for producing a MEMS transducer comprising a membrane and a carrier, wherein the membrane exhibits a meander structure comprising vertical and horizontal sections. Here, a shaping component is first provided which is coated with a membrane layer system. The membrane layer system comprises at least one actuator layer comprising an actuator material. By structuring the membrane layer system, membranes are provided which can be attached to a carrier. The shaping component can be completely removed.Furthermore, the invention preferably relates to a MEMS transducer which can be produced by means of the method.