Vertically Folded Probe for Enhanced Scrub and Reduced Inductance

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Solution Overview

Problem

Conventional probe geometries scaled to comply with the height limit of micro-fabrication struggle to achieve sufficient lateral scrub motion, leading to unfavorable performance characteristics.

Innovation Solution

A vertically folded probe design with three or more vertically overlapping and laterally displaced arm portions that deform to increase lateral scrub motion and reduce contact inductance, allowing for improved electrical contact and increased AC bandwidth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Length of stationary object

If conventional probe geometries are scaled to comply with the height limit of micro-fabrication, then the probe height is reduced to meet manufacturing constraints, but the lateral scrub motion becomes insufficient leading to unfavorable performance characteristics

Engineering Contradiction:
Improveprobe heightVSAvoidlateral scrub motion
Core Design Contradiction:
Length of stationary objectVSReliability

Solution Approach 1:

The probe arm is configured in a vertically folded geometry with three or more vertical arm portions that are laterally displaced and substantially overlap in the vertical direction. This dimensional reconfiguration allows the probe to achieve sufficient lateral scrub motion through vertical deformation while maintaining a compact height profile that complies with micro-fabrication constraints

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The vertically folded probe arm portions are arranged to substantially overlap in the vertical direction, creating a nested configuration where multiple arm portions occupy the same vertical space. This nesting enables the probe to pack sufficient lateral scrub capability into a height-constrained form factor

Inventive Principle:
Principle #7Nested doll (Nesting)

2Length of stationary object

If conventional probe geometries are scaled to comply with the height limit of micro-fabrication, then the probe height is reduced to meet manufacturing constraints, but the contact inductance increases reducing AC bandwidth

Engineering Contradiction:
Improveprobe heightVSAvoidcontact inductance
Core Design Contradiction:
Length of stationary objectVSDifficulty of detecting and measuring

Solution Approach 1:

The vertically folded configuration repositions the probe arm portions in the vertical dimension rather than extending them horizontally, which reduces the horizontal current path length and thereby reduces contact inductance while maintaining compliance with vertical height limits

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The vertically folded probe achieves significant lateral scrub motion and reduced inductance, enhancing reliable electrical contact and current carrying capability while adhering to the height constraints of micro-fabrication.

Implementation Method 1

the probe deforms. During probe deformation, at least two of the vertical arm portions come into contact with each other

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 2

Such contact between the arm portions can advantageously increase the lateral scrub motion at the probe tip, and can also advantageously reduce the probe inductance

Methodology Applied
Scientific EffectElectrical inductance reduction: Electromagnetic Induction

Data Source

PatentUS7944224B2Low profile probe having improved mechanical scrub and reduced contact inductance
Publication Date: 2011.05.17 MICROPROBE CORPORATION
  • US7944224B2 patent drawing
  • US7944224B2 patent drawing
  • US7944224B2 patent drawing

AI summary

A vertically folded probe is provided that can provide improved scrub performance in cases where the probe height is limited. More specifically, such a probe includes a base and a tip, and an arm extending from the base to the tip as a single continuous member. The probe arm is vertically folded, such that it includes three or more vertical arm portions. The vertical arm portions have substantial vertical overlap, and are laterally displaced from each other. When such a probe is vertically brought down onto a device under test, the probe deforms. During probe deformation, at least two of the vertical arm portions come into contact with each other. Such contact between the arm portions can advantageously increase the lateral scrub motion at the probe tip, and can also advantageously reduce the probe inductance.