Vertically Folded Probe for Enhanced Scrub and Reduced Inductance
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Solution Overview
Problem
Conventional probe geometries scaled to comply with the height limit of micro-fabrication struggle to achieve sufficient lateral scrub motion, leading to unfavorable performance characteristics.
Innovation Solution
A vertically folded probe design with three or more vertically overlapping and laterally displaced arm portions that deform to increase lateral scrub motion and reduce contact inductance, allowing for improved electrical contact and increased AC bandwidth.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of stationary object
If conventional probe geometries are scaled to comply with the height limit of micro-fabrication, then the probe height is reduced to meet manufacturing constraints, but the lateral scrub motion becomes insufficient leading to unfavorable performance characteristics
Solution Approach 1:
The probe arm is configured in a vertically folded geometry with three or more vertical arm portions that are laterally displaced and substantially overlap in the vertical direction. This dimensional reconfiguration allows the probe to achieve sufficient lateral scrub motion through vertical deformation while maintaining a compact height profile that complies with micro-fabrication constraints
Solution Approach 2:
The vertically folded probe arm portions are arranged to substantially overlap in the vertical direction, creating a nested configuration where multiple arm portions occupy the same vertical space. This nesting enables the probe to pack sufficient lateral scrub capability into a height-constrained form factor
2Length of stationary object
If conventional probe geometries are scaled to comply with the height limit of micro-fabrication, then the probe height is reduced to meet manufacturing constraints, but the contact inductance increases reducing AC bandwidth
Solution Approach 1:
The vertically folded configuration repositions the probe arm portions in the vertical dimension rather than extending them horizontally, which reduces the horizontal current path length and thereby reduces contact inductance while maintaining compliance with vertical height limits
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The vertically folded probe achieves significant lateral scrub motion and reduced inductance, enhancing reliable electrical contact and current carrying capability while adhering to the height constraints of micro-fabrication.
Implementation Method 1
the probe deforms. During probe deformation, at least two of the vertical arm portions come into contact with each other
Implementation Method 2
Such contact between the arm portions can advantageously increase the lateral scrub motion at the probe tip, and can also advantageously reduce the probe inductance
Data Source
AI summary
A vertically folded probe is provided that can provide improved scrub performance in cases where the probe height is limited. More specifically, such a probe includes a base and a tip, and an arm extending from the base to the tip as a single continuous member. The probe arm is vertically folded, such that it includes three or more vertical arm portions. The vertical arm portions have substantial vertical overlap, and are laterally displaced from each other. When such a probe is vertically brought down onto a device under test, the probe deforms. During probe deformation, at least two of the vertical arm portions come into contact with each other. Such contact between the arm portions can advantageously increase the lateral scrub motion at the probe tip, and can also advantageously reduce the probe inductance.


