Foraminous Burner Segmentation for Low Fuel Gas Consumption
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Solution Overview
Problem
Existing gas abatement apparatus for semiconductor and flat panel display manufacturing face challenges in efficiently treating high-flow gas streams with low fuel gas consumption, as reducing the aspect ratio of the foraminous burner below a certain value leads to increased CO and non-combusted fuel in the exhaust, and increased substrate sizes require larger chambers and higher flow rates, which increase fuel consumption.
Innovation Solution
Incorporating a second burner to heat the open end of the foraminous burner, allowing for a reduced aspect ratio without performance deterioration, and using multiple nozzles and burners with optimized fuel and oxidant injection to manage high flow rates and substrate sizes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If the aspect ratio of the foraminous burner is reduced to decrease fuel gas consumption, then fuel gas consumption is reduced, but the abatement performance deteriorates due to increased CO and non-combusted fuel in the exhaust
Solution Approach 1:
The single foraminous burner is divided into multiple burners (e.g., two or more burners arranged in parallel or series). Each burner operates independently to provide sufficient combustion zones, allowing the system to maintain high abatement performance while using smaller individual burners that consume less fuel gas collectively. This segmentation enables the aspect ratio of each burner to be optimized for lower fuel consumption without sacrificing overall treatment effectiveness.
Solution Approach 2:
Multiple burners are arranged within the combustion chamber in a nested or compact configuration, where smaller burners are positioned to maximize space utilization. This nesting approach allows the system to achieve the required total burning surface area and combustion capacity while maintaining a compact overall structure, thereby reducing fuel gas consumption without compromising abatement performance.
2Productivity
If the size of process chambers is increased to accommodate larger substrates, then substrate processing capacity is improved, but fuel gas consumption increases due to higher flow rates
Solution Approach 1:
The combustion system is segmented into multiple burners that can be independently controlled. Each burner handles a portion of the total gas flow, allowing the system to process higher flow rates from larger substrates while maintaining efficient fuel consumption per unit of treatment. The segmented approach enables scalable processing capacity without linearly increasing fuel gas consumption.
Solution Approach 2:
The system optimizes combustion parameters such as temperature, oxygen concentration, and residence time by adjusting the configuration and operation of multiple burners. This allows the apparatus to handle variable flow rates corresponding to different substrate sizes while maintaining optimal combustion efficiency and minimizing fuel gas consumption across different processing capacities.
3Productivity
If multiple nozzles and burners are used to handle high flow rates, then flow rate capacity is improved, but device complexity increases
Solution Approach 1:
The combustion chamber is divided into multiple combustion zones, each served by a separate but identical or similar burner assembly. This modular segmentation allows the system to handle high flow rates by simply adding or activating more burners rather than designing a completely different complex system. The repetitive modular structure actually reduces overall complexity compared to a single complex high-capacity burner.
Solution Approach 2:
The multiple burners are designed with universal, identical, or similar configurations that can handle different portions of the gas flow. This universality allows any burner to perform the same function, simplifying design, manufacturing, and maintenance. The system can flexibly activate the required number of burners based on flow rate demands, providing multi-functionality without proportionally increasing complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces fuel gas consumption while maintaining abatement performance, enabling the apparatus to handle increased flow rates and larger substrates without performance loss, by ensuring consistent temperature distribution and optimized combustion conditions.
Implementation Method 1
supplying fuel gas and oxidant to the foraminous burner to effect combustion at the exit surface
Implementation Method 2
a second burner for heating at least the open end of the foraminous burner
Implementation Method 3
The exit surface of the foraminous burner emits infrared radiation which assists in maintaining a high temperature within the combustion zone
Data Source
Figure 1
Figure 2
AI summary
Apparatus for the combustive destruction of noxious substances comprises an annular combustion zone (C14) surrounded by the exit surface of an inwardly fired foraminous burner (C32) and surrounding the exit surface of an outwardly fired foraminous burner (C42), means (C12) for injecting a gas stream containing at least one noxious substance into the combustion zone, and means for supplying fuel gas and oxidant to the foraminous burners to effect combustion at the exit surfaces.