Substrate Processing Force Log Aggregation for Energy Trend Analysis
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Solution Overview
Problem
Existing semiconductor manufacturing apparatuses lack an efficient method to aggregate and visualize the force measurement data, such as energy consumption, over specified periods, making it difficult to analyze and optimize processing efficiency.
Innovation Solution
An aggregation method that acquires log information including force measurement values and dates from sensors in a substrate processing apparatus, stores this data, and integrates it over specified aggregation periods to calculate integrated force values for each processing apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If force measurement data is collected and stored for each processing apparatus, then energy consumption analysis capability is improved, but data management complexity increases
Solution Approach 1:
The patent merges force measurement data from multiple processing apparatuses into a single aggregated data structure. The integration unit combines individual apparatus data with apparatus identification information, creating a unified dataset that can be analyzed collectively while maintaining the ability to trace back to individual sources when needed.
Solution Approach 2:
The data management system is designed to handle multiple types of information simultaneously - force measurement values, measurement timestamps, apparatus identification information, and aggregated results. This multi-functional approach allows a single system to perform data collection, storage, aggregation, and analysis without requiring separate specialized systems for each function.
2Productivity
If force measurement data from multiple processing apparatuses is aggregated, then energy consumption trend analysis is improved, but data integration complexity increases
Solution Approach 1:
The patent segments the aggregation process into distinct functional units: data acquisition from individual apparatuses, data storage with identification tagging, integration/aggregation of multiple datasets, and result output. This segmentation allows each unit to handle specific tasks independently, reducing the complexity of managing the entire aggregation system as a whole.
Solution Approach 2:
The integration unit acts as an intermediary between individual processing apparatuses and the analysis system. It receives data from multiple apparatuses, performs the aggregation operation, and delivers results to users or downstream systems. This intermediary layer simplifies the interface between diverse data sources and the analysis functionality.
3Loss of information
If integration calculation is performed over specified aggregation periods, then energy consumption pattern recognition is improved, but processing time increases
Solution Approach 1:
The system performs preliminary aggregation of force measurement data into defined time periods (e.g., daily, weekly, monthly intervals). By pre-grouping data into these aggregation periods with associated identification information, the system prepares data in advance for pattern analysis, reducing the computational burden when analyzing energy consumption patterns over time.
Data Source
AI summary
An aggregation method includes: acquiring log information including a measurement value of a force used by a processing apparatus and a measurement date and time, the measurement value being measured by a sensor of the processing apparatus that processes a substrate; storing the measurement value of the force and the measurement date and time included in the acquired log information in a storage unit; and integrating the measurement value of the force associated with the measurement date and time in a specified aggregation period with reference to the storage unit to calculate an integrated value of the force for each processing apparatus.