Force Sensor Gap-Controlled Over-Force Protection

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Solution Overview

Problem

Force sensors with mechanical deflection limiters are needed to protect microelectronic sensors from excessive deformation and breakage, especially in environments where high external forces are unpredictable and could exceed the sensor's operational limits.

Innovation Solution

A force sensor design featuring a flip-chip mounted force-sensing die with a flexible diaphragm and a predetermined gap between the die and the mounting substrate, which includes a mechanical stop to limit deflection and prevent deformation beyond a breaking point, ensuring precise and reliable measurements even under high external forces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the force sensor is designed to be highly sensitive for precise measurements, then measurement precision is improved, but the sensor becomes vulnerable to damage from excessive forces

Engineering Contradiction:
Improvemeasurement precisionVSAvoidsensor durability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

A mechanical stop is integrated into the force sensor structure to physically limit the deflection of the flexible diaphragm before excessive force can damage the sensor. This predetermined mechanical barrier cushions the sensor against over-force events, allowing the use of highly sensitive sensing elements without compromising reliability.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Reliability

If a mechanical deflection limiter is added to protect the sensor, then sensor durability is improved, but the device complexity increases

Engineering Contradiction:
Improvesensor durabilityVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The mechanical stop is integrated directly into the substrate structure, merging the protective function with the mounting structure. This eliminates the need for separate protective components and reduces overall device complexity while maintaining sensor durability.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The mechanical stop structure automatically limits diaphragm deflection through its predetermined geometry, requiring no external control systems or additional components. The structure serves its own protective function, simplifying the overall device design.

Inventive Principle:
Principle #25Self-service

3Volume of moving object

If the gap between the force-sensing die and mounting substrate is reduced for compact packaging, then device size is reduced, but the deflection limitation capability is compromised

Engineering Contradiction:
Improvedevice sizeVSAvoiddeflection control
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The substrate is designed with a localized mechanical stop feature at the specific location where deflection limitation is needed, while maintaining a compact overall gap structure. This allows precise control of diaphragm deflection at the sensing region without requiring a large overall device volume.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables force sensors to operate reliably and accurately over a long period, preventing damage from excessive forces and allowing for precise low-force measurements, while also enabling compact packaging for use in small spaces, thus reducing replacement costs and enhancing performance in applications like medical devices.

Implementation Method 1

an unflipped back surface being thinned so as to create a flexible diaphragm responsive to an externally applied force

Methodology Applied
Scientific EffectFlexibility: Elasticity

Implementation Method 2

a predetermined space remains between the top surface of the force-sensing die and the mounting substrate it faces, the substrate presenting a deflection limitation for the deformation of the flexible membrane during a force event

Methodology Applied
Scientific EffectMechanical deflection limitation: Mechanical Force

Data Source

PatentEP3063517B1Force sensor with gap-controlled over-force protection
Publication Date: 2020.03.04 HONEYWELL INTERNATIONAL INC
  • EP3063517B1 patent drawingFigure 1A
  • EP3063517B1 patent drawingFigure 1B~1C
  • EP3063517B1 patent drawingFigure 2A~2B

AI summary

Apparatus and associated methods relate to a force sensor having flip-chip mounted force-sensing die having a force-sensing element fabricated on an unflipped top surface and an unflipped back surface being thinned so as to create a flexible diaphragm responsive to an externally applied force, wherein, when the force-sensing die is flipped and mounted, a predetermined space remains between the top surface of the force-sensing die and the mounting substrate it faces, the substrate presenting a deflection limitation for the deformation of the flexible membrane during a force event. In an illustrative embodiment, the force sensor may have a mechanical stop to precisely establish a predetermined deflection limitation. In some embodiments, the predetermined deflection limitation may advantageously limit the deflection of the flexible membrane so as not to deflect beyond a breaking point.