Force Sensor Gel Protection for MEMS Wearout

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Solution Overview

Problem

MEMS force sensors face challenges in protecting their sensing elements from external forces without increasing manufacturing costs, as direct exposure leads to wearout and adding a cover increases costs.

Innovation Solution

A force sensor design incorporating a first gel to cover the sensing portion of the sensing element, with a second gel surrounding the first gel and circuit board, providing support and protection without the need for additional covers, using different materials for the gels to optimize performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a cover is added to cover the sensing element and increase support, then the sensing element is protected from being worn out, but the manufacturing cost of the sensor is increased

Engineering Contradiction:
Improveprotection of sensing elementVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent introduces a gel layer as an intermediary substance between the sensing element and the external environment. This gel layer serves as a protective mediator that absorbs external forces and protects the sensing element from direct contact and wearout, while being simpler and cheaper to manufacture than adding a separate cover structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the physical state and properties of the protective layer by using gel material with specific viscoelastic properties. The gel's ability to deform and recover under stress provides protection while maintaining cost-effectiveness, representing a parameter-based solution rather than a structural addition.

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If the sensing element is exposed and is directly subjected to the pressing force, then the manufacturing cost is reduced, but the sensing element is easily worn out due to insufficient support

Engineering Contradiction:
Improvemanufacturing costVSAvoiddurability of sensing element
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The gel layer acts as an intermediary that allows the sensing element to remain relatively exposed while still providing protection. The gel mediates between the external pressing force and the sensing element, distributing the force and preventing direct contact wear without requiring a full cover structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The gel layer provides beforehand cushioning by being positioned between the external environment and the sensing element before any force is applied. The gel's viscoelastic properties allow it to cushion incoming forces in advance, protecting the sensing element from impact and wear.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The gel-based protection system effectively shields the sensing element from external forces, maintaining sensing performance while reducing manufacturing costs by eliminating the need for additional covers.

Implementation Method 1

The sensing portion is adapted to generate a sensing signal through an external force transferred from the first gel to the top surface

Methodology Applied
Scientific EffectForce transfer through gel material: Elasticity

Implementation Method 2

A force sensor includes a circuit board, a sensing element, and a first gel

Methodology Applied
Scientific EffectViscoelasticity: Viscoelasticity

Data Source

PatentUS11506549B2Force sensor
Publication Date: 2022.11.22 CORETRONIC MEMS CORP
  • US11506549B2 patent drawing
  • US11506549B2 patent drawing

AI summary

A force sensor includes a circuit board, a sensing element, and a first gel. The sensing element is disposed on the circuit board, wherein the sensing element has a top surface and a bottom surface opposite to each other and has a sensing portion. The bottom surface faces the circuit board. The sensing portion is located at the top surface. The first gel is disposed on the top surface and covers the sensing portion, wherein the sensing portion is adapted to generate a sensing signal through an external force transferred from the first gel to the top surface.