Force Sensor Module with Grounded Spacer Layer
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Solution Overview
Problem
The existing force sensor modules, such as those described in Patent Literature 1, are susceptible to damage from electrostatic discharge when the glass substrate with a metasurface pattern becomes electrically charged.
Innovation Solution
A force sensor module is designed with a first substrate having a metasurface pattern, a second substrate with a reflective layer, a spacer layer made of an electrically-conductive material, a joining layer, and a grounding wire connected to the spacer layer to reduce the risk of electrostatic discharge damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a glass first substrate with a metasurface pattern is used in the force sensor module, then the optical detection function is achieved, but the metasurface pattern is vulnerable to damage from electrostatic discharge
Solution Approach 1:
A grounding wire is introduced as an intermediary component between the glass substrate and the external environment. The grounding wire provides a dedicated electrical conduction path that mediates the discharge of static electricity, preventing direct electrostatic discharge to the metasurface pattern while maintaining the optical functionality of the glass substrate
Solution Approach 2:
The electrical conduction function is extracted from the glass substrate system and implemented separately through a dedicated grounding wire. This separation allows the glass substrate to maintain its optical transparency and metasurface pattern integrity while the grounding wire handles the electrical discharge protection function independently
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The implementation of the grounding wire and electrically-conductive spacer layer effectively reduces the chance of the metasurface pattern being damaged by electrostatic discharge, enhancing the module's reliability and longevity.
Implementation Method 1
the first substrate, which has the metasurface pattern provided thereon and which is made of glass, becomes electrically charged for some reason, the metasurface pattern could be damaged by electrostatic discharge
Implementation Method 2
The spacer layer is provided on the first principal surface and made of an electrically-conductive material. The grounding wire is connected to the spacer layer
Data Source
AI summary
In order to reduce the chance that a metasurface pattern is damaged by electrostatic discharge, a force sensor module includes a first substrate having light transparency; a metasurface pattern provided on a first principal surface; a second substrate provided so as to face the first substrate and including a second principal surface facing the first principal surface; a reflective layer provided on the second principal surface; a spacer layer provided on the first principal surface and made of an electrically-conductive material; a joining layer for joining the second principal surface and the spacer layer together; and a grounding wire connected to the spacer layer.