Force Sensor Sealing With Inert Filling to Prevent Oxidation
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Solution Overview
Problem
The existing displacement sensors with an air gap structure face oxidation issues due to exposure of metal arrays and layers to air, leading to deteriorated sensor characteristics.
Innovation Solution
A force sensor design that includes a first substrate with a metal array, a second substrate with a metal layer, and a connecting member forming an internal space filled with an inert substance, preventing exposure to oxygen and thus inhibiting oxidation. The manufacturing method involves preparing the substrates, decompressing, filling the space with an inert substance, and sealing it to maintain a consistent gap.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the metal array and metal layer are exposed to air in the air gap structure, then the sensor can operate with a simple structure, but the metal components will oxidize and sensor characteristics will deteriorate
Solution Approach 1:
The patent applies the inert atmosphere principle by filling the internal space with an inert substance (nitrogen gas or silicone oil) to create a protective environment. This prevents oxidation of the metal array and metal layer while maintaining the sensor's operational characteristics, resolving the contradiction between structural simplicity and reliability.
2Reliability
If the internal space is sealed to prevent oxidation, then the metal components are protected from oxygen, but the manufacturing process becomes more complex
Solution Approach 1:
The patent applies preliminary action by performing the decompression and inert substance filling operations before final sealing of the connecting member. This sequence allows the internal space to be prepared and protected against oxidation prior to permanent sealing, making the manufacturing process more manageable while ensuring reliable oxidation prevention.
3Reliability
If the gap between substrates is maintained constant, then the sensor performance is stable, but additional components are required to regulate the gap
Solution Approach 1:
The patent introduces a spacer member as an intermediary component between the first and second substrates. This spacer maintains a constant gap distance, ensuring stable sensor performance while providing a simple and effective solution to the gap regulation requirement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents oxidation of the metal array and layer, ensuring stable sensor performance by maintaining the gap and preventing exposure to oxygen, thereby enhancing the durability and reliability of the force sensor.
Implementation Method 1
The first substrate is made of a material that transmits electromagnetic waves
Implementation Method 2
The second substrate has a metal layer that reflects the electromagnetic waves transmitted through the first substrate on its surface
Data Source
AI summary
Provided is a force sensor including: a first substrate that is made of a material that transmits electromagnetic waves and includes a metal array arranged in a periodic pattern on its surface; a second substrate that is disposed to face the first substrate with a gap therebetween and includes a metal layer that reflects the electromagnetic waves transmitted through the first substrate on its surface; a connecting member configured to connect the first substrate to the second substrate and define an internal space that houses the metal array and the metal layer; and an inert substance that fills the internal space.