Force Sensor Metasurface Protective Layer Oxidation
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Solution Overview
Problem
The production of force sensors with metasurface patterns is hindered by the susceptibility of these patterns to oxidation during cleaning processes, which can alter the desired response characteristics.
Innovation Solution
A force sensor design that includes a protective layer covering the metasurface pattern, preventing direct exposure to cleaning liquids and thus reducing oxidation effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the first substrate and second substrate are cleaned prior to joining to remove foreign matter, then cleaning effectiveness is improved, but the metasurface pattern surface undergoes oxidation due to direct exposure to cleaning liquid
Solution Approach 1:
A protective layer is introduced as an intermediary between the metasurface pattern and the cleaning liquid. This protective layer allows the cleaning liquid to contact and remove foreign matter from the metasurface pattern without causing oxidation, as the protective layer acts as a barrier that prevents direct harmful interaction while permitting the cleaning function to occur.
Solution Approach 2:
The protective layer is formed on the metasurface pattern before the cleaning process. This preliminary action ensures that when cleaning liquid is subsequently applied, the metasurface pattern is already protected from oxidation while still allowing effective removal of foreign matter during the cleaning step.
2Manufacturing precision
If the metasurface pattern is directly exposed to cleaning liquid for dust removal, then foreign matter is removed, but the response characteristics change due to surface oxidation
Solution Approach 1:
The protective layer serves as a mediator that enables foreign matter removal while preserving response characteristics. It allows cleaning liquid to access and remove dust and contaminants from the metasurface pattern without permitting the oxidation that would alter the electromagnetic properties and response characteristics of the pattern.
Solution Approach 2:
The protective layer converts the potentially harmful effect of cleaning liquid exposure into a beneficial process. By being present during cleaning, the protective layer transforms what would be a harmful oxidation event into a safe cleaning operation, allowing thorough removal of foreign matter while the protective layer itself prevents damage to the response characteristics.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The protective layer effectively reduces adverse effects such as oxidation on the metasurface pattern, ensuring that the force sensor maintains the desired response characteristics specified at the time of design.
Implementation Method 1
performing such cleaning can cause oxidation of the surface of the metasurface pattern due to direct exposure of the metasurface pattern to a cleaning liquid
Implementation Method 2
light enters the metasurface pattern, and the light that passes through the metasurface pattern and that is reflected by the reflective layer is used to obtain information concerning the spacing
Data Source
AI summary
A force sensor is provided, the force sensor including: a first substrate; a metasurface pattern provided on a principal surface; a protective layer covering the metasurface pattern; a second substrate provided so as to face the first substrate; a reflective layer provided on a second principal surface; and a spacer defining a spacing between the first substrate and the second substrate, so that the force sensor is capable of offering desired response characteristics specified at the time of design.