Force Sensor Relaxation Parts for Thermal Error Reduction

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Solution Overview

Problem

Conventional displacement detection type force sensors are prone to measurement inaccuracies due to factors other than applied forces, such as internal heat generation or environmental temperature changes, which can cause components to deflect or deform, leading to deteriorated measurement accuracy.

Innovation Solution

The force sensor design incorporates elastically deformable substrate and connection parts with relaxation mechanisms, allowing for relative movement and rotation detection along multiple axes, and includes first and second relaxation parts to absorb and dissipate heat-induced deformations, thereby maintaining measurement accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If rigid substrate parts and connection parts are used to maintain structural stability, then the sensor body maintains structural integrity, but measurement accuracy deteriorates due to deflection or deformation from internal heat generation or environmental temperature changes

Engineering Contradiction:
Improvestructural integrityVSAvoidmeasurement accuracy
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The sensor body is divided into multiple substrate parts (first substrate part, second substrate part, third substrate part) connected by bridge parts and connection parts. This segmentation allows different parts to have different functions: some parts maintain structural integrity while others are designed to be elastically deformable to compensate for thermal effects, thereby resolving the contradiction between structural stability and measurement accuracy.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the physical parameters of specific parts by making at least one of the first substrate part or first connection part elastically deformable, and making the second column part elastically deformable. This allows these parts to flexibly adapt to thermal expansion or contraction, compensating for dimensional changes caused by temperature variations and maintaining measurement accuracy while preserving overall structural integrity.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If elastically deformable parts are introduced to compensate for thermal effects, then measurement accuracy is maintained, but device complexity increases due to additional relaxation parts and deformable components

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidstructural complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The bridge parts and connection parts serve multiple functions: they provide structural support to maintain integrity, enable relative movement between substrate parts, and incorporate relaxation mechanisms to compensate for thermal effects. By making these components multi-functional, the patent achieves measurement accuracy compensation without adding separate dedicated compensation mechanisms, thereby limiting the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The relaxation parts are integrated into the existing bridge parts and connection parts rather than being added as separate components. The first relaxation part is provided to at least one of the first substrate part, first connection part, second substrate part and second connection part, merging the thermal compensation function with the structural connection function, thus reducing overall device complexity while maintaining measurement accuracy.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the accuracy of force and moment component detection by minimizing errors caused by factors other than external forces, ensuring precise measurement of applied forces and moments.

Implementation Method 1

a first detection part configured to detect a relative displacement between the first substrate part and the second substrate part

Methodology Applied
Scientific EffectElectrostatic capacitance: Capacitance

Implementation Method 2

at least one of the first substrate part and the first connection part is configured to be elastically deformable

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 3

a component for detecting an amount of displacement may be deflected or deformed due to a factor other than a force applied to the sensor (e.g., internal heat generation or change in environmental temperature)

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS11353372B2Displacement detection type force sensor
Publication Date: 2022.06.07 FANUC LTD
  • US11353372B2 patent drawing
  • US11353372B2 patent drawing
  • US11353372B2 patent drawing

AI summary

A displacement detection type force sensor, having a mechanism for relaxing deformation of a member due to a factor other than an external force. The force sensor has at least one of: a first relaxation part elastically deformable along a plane perpendicular to a first axis, and provided to at least one of a first substrate part, a first connection part, a second substrate part and a second connection part; and a second relaxation part elastically deformable along the first axis, and provided to at least one of the second substrate part, the second connection part, a third substrate part and a third connection part.