Force Sensor Strain Gauge Transfer for Higher Sensitivity
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Solution Overview
Problem
Conventional force sensors suffer from reduced sensitivity due to the presence of a thick dielectric layer between the strain gauge and the strain element, which impairs the strain gauge's ability to conform to deformation, necessitating a thinner dielectric layer for enhanced sensitivity.
Innovation Solution
A method for producing a force sensor involving a semiconductor transfer production process to form a conductor layer directly or indirectly on a plate-shaped member, processing it into strain gauges, and optionally using a dielectric layer to integrate the strain gauges directly or via a single layer on the member's surface, eliminating the need for a separate fusion layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a thick dielectric layer is provided between the strain gauge and the strain element, then insulation is ensured, but sensitivity is deteriorated
Solution Approach 1:
The patent extracts the fusion layer from the conventional structure and replaces it with a conductor layer formed directly on the strain element. This eliminates the need for a thick dielectric layer while maintaining insulation through the conductor layer itself, which serves both as the strain gauge support and as the insulating element when made of non-conductive material.
Solution Approach 2:
The patent changes the material parameter of the layer between the strain gauge and strain element from a thick dielectric material to a thin conductor layer (or vice versa depending on implementation). This parameter change allows the distance to be reduced while maintaining the necessary electrical insulation properties through alternative material selection and layer configuration.
2Ease of manufacture
If a fusion layer is provided to mount the strain gauge, then mounting is enabled, but the distance between strain gauge and strain element increases
Solution Approach 1:
The patent merges the function of the fusion layer with the conductor layer by forming the conductor layer directly on the strain element. This consolidation eliminates the separate fusion layer and reduces the overall distance while maintaining both mounting capability and electrical insulation through the integrated layer structure.
Solution Approach 2:
The conductor layer serves multiple functions simultaneously: it acts as the mounting base for the strain gauge, provides electrical insulation when made of non-conductive material, and maintains mechanical integrity. This multi-functionality eliminates the need for separate specialized layers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resulting force sensor achieves higher sensitivity by minimizing the distance between the strain gauges and the strain element, enhancing the sensor's responsiveness to external forces.
Implementation Method 1
a first step of forming a conductor layer directly or indirectly on one of main surfaces of the plate-shaped member
Data Source
AI summary
A method for producing a force sensor is a method for producing a force sensor that includes a plate-shaped member (base material) and a strain gauge made of a conductor film, the method including: a first step (see (c)) of forming a conductor layer on one of main surfaces of the plate-shaped member (base material) via a dielectric layer; and a second step (see (d)) of processing the conductor film into the strain gauges by a semiconductor transfer production method.