Foreign Metal Removal from Copper Plating Electrolyte

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Solution Overview

Problem

In component carrier manufacturing, foreign metals like iron in the electrolyte reduce the efficiency of copper plating and pose safety risks due to chemical reactions, leading to adhesion issues and reduced copper deposition quality.

Innovation Solution

A method involving membrane electrolysis to oxidize foreign metals from a first oxidation state to a second, followed by ion exchange to separate them, resulting in a processed fluid suitable for high-quality electrolysis, utilizing a semipermeable membrane and selective ion exchange resin to enhance metal removal efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If foreign metals like iron are present in the electrolyte, then the electrolyte can be used for plating, but the efficiency of copper deposition is reduced and adhesion problems occur

Engineering Contradiction:
Improveefficiency of copper depositionVSAvoidadhesion problems and quality reduction
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The patent applies preliminary action by performing oxidation of Fe2+ to Fe3+ and ion exchange separation before the copper plating process. This pre-treatment removes foreign metals from the electrolyte, preventing adhesion problems and ensuring high-quality copper deposition without compromising productivity.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If ion exchange is used to remove foreign metals, then metal purity is improved, but processing time and complexity increase

Engineering Contradiction:
Improvemetal purityVSAvoidprocessing steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent employs parameter changes by oxidizing iron from Fe2+ to Fe3+ state, which fundamentally alters the ion exchange behavior. Fe3+ has different charge and size characteristics that enable selective removal through ion exchange resins, achieving high metal purity while maintaining a relatively simple two-step process structure.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The oxidation step acts as an intermediary process that transforms Fe2+ into Fe3+, creating a form that can be effectively removed by ion exchange. This intermediate transformation enables the ion exchange resin to selectively bind and remove iron impurities, achieving high purity copper deposition.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly improves the efficiency of the electrolysis process by effectively removing foreign metals, such as iron, thereby enhancing copper deposition quality and operational safety.

Implementation Method 1

performing a membrane electrolysis, thereby oxidizing the metal from the first oxidation state to a second oxidation state

Methodology Applied
Scientific EffectElectrochemical oxidation: Oxidation

Implementation Method 2

an ion exchange device, arranged in process direction downstream of the membrane electrolysis device, and configured to separate the metal in the second oxidation state

Methodology Applied
Scientific EffectIon exchange: Ion Exchange

Data Source

PatentEP4339165A1Separating a foreign metal from a process fluid, method and apparatus
Publication Date: 2024.03.20 AT & S AUSTRIA TECHNOLOGIE & SYSTEMTECHNIK AG
  • EP4339165A1 patent drawingFigure 1~3
  • EP4339165A1 patent drawing
  • EP4339165A1 patent drawing

AI summary

There is described a method of processing a metal-containing fluid (101), the method comprising: i) providing the metal-containing fluid (101) that comprises at least one metal in a first oxidation state; ii) performing a membrane electrolysis (110), thereby oxidizing the metal from the first oxidation state to a second oxidation state to obtain an oxidized metal-containing fluid (102); and thereafter iii) streaming the oxidized metal-containing fluid (102) through an ion exchange device (120), thereby separating the metal in the second oxidation state from the oxidized metal-containing fluid (102) to obtain a processed metal-containing fluid (105).