Foreign Substance Detection Device Light Adjuster
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Solution Overview
Problem
Existing foreign substance detection methods in substrate processing systems face inefficiencies in detecting foreign substances due to varying liquid characteristics and flow conditions, leading to suboptimal detection precision and accuracy.
Innovation Solution
A foreign substance detection device with multiple processing liquid flow path forming mechanisms, a radiator that adjusts radiation light intensity, and a light receiver to efficiently detect foreign substances by optimizing light exposure based on the state of the processing liquid, including a light adjuster to balance noise components and maintain detection precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a fixed light amount is used for radiation, then the device structure is simple, but detection precision deteriorates due to varying liquid characteristics and flow conditions
Solution Approach 1:
The light amount is made dynamically adjustable through the light adjuster (ND filter or beam splitter) rather than being fixed. The system can change the light amount radiated to the flow path based on detection needs, allowing optimization of detection precision for different liquid characteristics and flow conditions without requiring complete redesign of the device structure
Solution Approach 2:
The light amount parameter is made variable through the light adjuster mechanism. By changing the light amount parameter (using ND filters with different transmittance or beam splitter ratios), the system adapts to different detection scenarios involving various liquid characteristics and flow conditions, thereby improving detection precision without fundamentally altering the device structure
2Measurement precision
If light amount is increased to improve detection accuracy, then detection precision improves, but noise components increase leading to reduced accuracy
Solution Approach 1:
The light amount is precisely controlled and optimized as a variable parameter. The light adjuster enables selection of appropriate light amounts for different detection scenarios, allowing the system to operate at optimal light levels that maximize signal-to-noise ratio for specific liquid characteristics and flow conditions, thereby improving detection accuracy without excessive noise
Solution Approach 2:
The system incorporates feedback mechanisms to monitor detection signals and adjust the light amount accordingly. By observing the detection output and noise levels, the light adjuster can be tuned to provide the optimal light amount that achieves high detection accuracy while minimizing noise components generated by the processing liquid
3Productivity
If multiple flow paths are monitored simultaneously, then productivity improves, but device complexity increases
Solution Approach 1:
The light source, radiator, and light adjuster components serve multiple flow paths simultaneously. A single light source can illuminate multiple flow paths through the radiator structure, and the light adjuster can control light distribution across multiple paths, enabling multi-flow path monitoring without proportionally increasing device complexity
Solution Approach 2:
Multiple flow path detection functions are merged into a unified detection system. The light source, radiator, and detection mechanism are combined to monitor multiple flow paths simultaneously, achieving high productivity through integrated design rather than separate independent detection systems for each flow path
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient detection of foreign substances by adjusting light intensity according to the state of the processing liquid, improving detection precision and accuracy across different liquid characteristics and flow conditions.
Implementation Method 1
a radiator configured to radiate radiation light from a light source toward each of the multiple processing liquid flow paths; and a light receiver configured to receive light emitted from the processing liquid flow paths by radiating the radiation light
Data Source
AI summary
A foreign substance detection device configured to detect a foreign substance contained in a processing liquid configured to process a substrate includes multiple processing liquid flow path forming mechanisms configured to form multiple processing liquid flow paths through which the processing liquid to be supplied to the substrate flows; a radiator configured to radiate radiation light from a light source toward each of the multiple processing liquid flow paths; and a light receiver configured to receive light emitted from the processing liquid flow paths by radiating the radiation light. The radiator includes a light adjuster configured to adjust a light amount of the radiation light radiated to the multiple processing liquid flow paths.