Foreign Substance Inspection Using Pixel Continuity

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Solution Overview

Problem

Existing foreign substance inspection apparatuses struggle to detect foreign substances accurately over a wide range, especially when the alignment accuracy of the inspected object is low, often misidentifying frames as foreign substances and excluding regions near the frame from inspection.

Innovation Solution

A foreign substance inspection apparatus that uses a sensor to illuminate the object and output images, with a processor that detects foreign substances by excluding a non-inspection region image from the inspection region image, identifying continuous pixel values to specify the non-inspection region and thereby enhancing detection accuracy across a broader area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the inspection target region is set to be sufficiently away from the inner edge of the frame in accordance with alignment accuracy, then false detection of frames as foreign substances is prevented, but the inspection coverage area is reduced and foreign substances near the frame cannot be detected

Engineering Contradiction:
Improvedetection accuracyVSAvoidinspection coverage area
Core Design Contradiction:
Measurement precisionVSArea of stationary object

Solution Approach 1:

The image is segmented into multiple regions: a first non-inspection region (the frame itself), a second non-inspection region (area excluded due to alignment accuracy), and an inspection region (area between the frame and the excluded region). This segmentation allows the system to process different regions with different criteria, enabling detection in the inspection region while excluding the frame region through pixel value continuity analysis.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different processing approaches are applied to different regions of the image. The first non-inspection region (frame) is identified and excluded based on pixel value continuity, while the inspection region undergoes foreign substance detection. This local differentiation allows the system to maintain high detection accuracy in the inspection region without false positives from the frame.

Inventive Principle:
Principle #3Local quality

2Ease of operation

If the alignment accuracy is low, then the original can be conveyed and positioned, but frames are detected as foreign substances and regions near the frame are excluded from inspection

Engineering Contradiction:
Improveconveyance capabilityVSAvoiddetection accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The system performs preliminary identification of the frame and determination of non-inspection regions before conducting foreign substance detection. By预先 identifying the first non-inspection region through pixel value continuity and establishing the inspection region boundaries, the system prepares the detection framework in advance, allowing accurate detection even when alignment accuracy is low.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The inspection region acts as an intermediary zone between the frame (first non-inspection region) and the excluded area (second non-inspection region). This intermediary region is where foreign substance detection is performed, serving as a buffer that allows the system to maintain detection capability while excluding problematic areas due to alignment issues.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the detection of foreign substances over a wider range even with low alignment accuracy, preventing false positives from frame structures and ensuring thorough inspection by defining inspection and non-inspection regions based on pixel value continuity.

Implementation Method 1

a sensor configured to illuminate the inspected object and output, as an image, a result acquired by detecting light from a region including the inspection region

Methodology Applied
Scientific EffectLight detection: Photoelectric Effect

Data Source

PatentUS11513082B2Foreign substance inspection apparatus and foreign substance inspection method
Publication Date: 2022.11.29 CANON KK
  • US11513082B2 patent drawing
  • US11513082B2 patent drawing
  • US11513082B2 patent drawing

AI summary

Apparatus inspects the presence/absence of foreign substance on object having inspection region and non-inspection region arranged outside the inspection region. The apparatus includes sensor for illuminating the object and output, as image, result acquired by detecting light from region including the inspection region, and processor for detecting foreign substance based on inspection region image acquired by excluding non-inspection region image, which is image of the non-inspection region, from the image output from the sensor. The non-inspection region image includes first part generated by light from predetermined part of the non-inspection region of the inspected object and second part whose pixel value is continuous from pixel value of the first part and the processor specifies the second part based on fact that the pixel value of the second part is continuous from that of the first part.