Substrate Fork Distance Detection via Gas Flow Measurement

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Solution Overview

Problem

Existing substrate processing apparatuses face challenges in accurately determining the distance between moving components and interfering objects due to positional deviations, leading to potential contact and damage, especially when using electrostatic capacitance sensors which are affected by material properties.

Innovation Solution

A substrate processing apparatus equipped with a nozzle and flow rate sensor system that measures gas flow through a nozzle flow path to determine the distance between the fork and interfering objects, allowing for accurate contact detection regardless of material conductivity or dielectric constant.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If electrostatic capacitance sensors are used to detect distance, then measurement capability is provided, but measurement precision deteriorates due to influence from material properties such as conductivity and dielectric constant

Engineering Contradiction:

Improvedistance measurement precisionVSAvoidsensitivity to material properties

Core Design Contradiction:

Measurement precisionVSAdaptability or versatility

Solution Approach 1:

The patent replaces electrostatic capacitance sensors with flow rate sensors that detect distance through gas flow characteristics. This substitution eliminates the influence of material properties like conductivity and dielectric constant, achieving universal and precise distance measurement regardless of the interfering object's material composition.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention uses gas flow through a nozzle as the detection mechanism. By measuring the flow rate of gas passing through the nozzle, the system determines distance to the interfering object without contact. This pneumatic approach inherently avoids the material property dependencies that plague electrostatic methods.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Productivity

If the fork moves closer to substrates for efficient transfer, then productivity improves, but the risk of contact and damage increases

Engineering Contradiction:

Improvesubstrate transfer efficiencyVSAvoidcontact damage risk

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The flow rate sensor continuously monitors distance before contact occurs. By detecting the approaching interfering object through gas flow changes, the system can issue warnings or adjust the fork's movement in advance, preventing contact damage while maintaining efficient transfer operations.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system establishes a feedback loop where the flow rate sensor continuously provides distance information to the control unit. This real-time feedback enables dynamic adjustment of the fork's position and movement, allowing the system to operate at optimal proximity without risking contact, thus maintaining high productivity while ensuring safety.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise determination of contact between the fork and substrates or structures, preventing damage and ensuring safe operation by accurately measuring the flow rate changes based on distance variations.

Implementation Method 1

a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path

Methodology Applied

Scientific EffectGas flow measurement:

Implementation Method 2

a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows

Methodology Applied

Scientific EffectGas flow through nozzle:

Data Source

PatentUS20240175131A1State determination method and computer-readable recording medium

Publication Date: 2024.05.30 TOKYO ELECTRON LTD

AI summary

A substrate processing apparatus configured to process a substrate includes a functional component constituting a part of the substrate processing apparatus; a nozzle, provided on a surface of the functional component, allowing a gas to pass therethrough; a nozzle flow path which is connected to the nozzle of the functional component and through which the gas flows; a flow rate sensor configured to measure a flow rate of the gas flowing through the nozzle flow path; and a controller configured to make a determination upon a state of a distance between an interfering object and the functional component based on a measurement result obtained by the flow rate sensor.