Form Measuring Apparatus with Dynamic Light Modulation

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Solution Overview

Problem

Existing form measuring apparatuses face challenges in maintaining consistent grating pattern intervals and intensity distribution across the measuring area, especially when scanning objects with varying distances from the projector, leading to inaccuracies and reduced measuring range.

Innovation Solution

The apparatus employs a modulator that adjusts the modulation period and amplitude of the laser light based on the directional change of the MEMS mirror, using correction functions to ensure uniform grating intervals and intensity distribution, synchronized with the imaging process to maintain accuracy across a wider measuring range.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a grating pattern is projected using a scanner (mirror) to measure three-dimensional forms, then the measuring range can be expanded, but the grating pattern intervals and intensity distribution become non-uniform across the measuring area

Engineering Contradiction:
Improvemeasuring areaVSAvoidgrating pattern interval uniformity
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent applies parameter changes by dynamically adjusting the modulation period and amplitude of the light source based on the scanning angle. Specifically, the modulation period is extended and amplitude is reduced at larger scanning angles to compensate for the non-uniform spacing caused by angular deviation, thereby maintaining uniform grating pattern intervals across the entire measuring area regardless of the expanded field of view.

Inventive Principle:
Principle #35Parameter changes

2Area of stationary object

If the scanning angle is increased to expand measuring range, then more of the object can be measured, but the intensity distribution of the projected grating pattern becomes non-uniform

Engineering Contradiction:
Improvemeasuring rangeVSAvoidgrating pattern intensity distribution
Core Design Contradiction:
Area of stationary objectVSIllumination intensity

Solution Approach 1:

The patent compensates for intensity distribution non-uniformity by dynamically adjusting the modulation amplitude of the light source according to the scanning angle. At larger scanning angles where intensity naturally diminishes, the modulation amplitude is increased to maintain consistent grating pattern visibility and measurement accuracy across the entire measuring area.

Inventive Principle:
Principle #35Parameter changes

3Ease of operation

If conventional projection methods are used without angular compensation, then the system is simpler to operate, but measurement accuracy decreases for objects at varying distances

Engineering Contradiction:
Improvesystem operation simplicityVSAvoidthree-dimensional form measurement accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent implements feedback control by using the detected scanning angle information to dynamically adjust the modulation parameters of the light source. The scanning angle is continuously monitored, and this information feeds back to the modulation unit, which automatically adjusts the modulation period and amplitude in real-time to maintain measurement accuracy across varying object distances and positions.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for accurate three-dimensional form measurement of objects regardless of their position, expanding the measuring range while maintaining high precision and reducing measurement time.

Implementation Method 1

a light generator configured to generate a light; a projector configured to scan the measuring object with the light by changing an irradiation direction of the light generated by the light generator; a controller configured to control the light generator to periodically change an intensity of the light generated by the light generator

Methodology Applied
Scientific EffectLight generation and modulation: Light

Implementation Method 2

a projector configured to scan the measuring object with the light by changing an irradiation direction of the light

Methodology Applied
Scientific EffectLight reflection and directional control: Reflection

Data Source

PatentUS9146096B2Form measuring apparatus, structure manufacturing system, scanning apparatus, method for measuring form, method for manufacturing structure, and non-transitory computer readable medium storing program for measuring form
Publication Date: 2015.09.29 NIKON CORP
  • US9146096B2 patent drawing
  • US9146096B2 patent drawing
  • US9146096B2 patent drawing

AI summary

There is provided a form measuring apparatus including: a light generator configured to generate a light; a projector configured to scan the measuring object with the light by changing an irradiation direction of the light generated by the light generator; a controller configured to control the light generator to periodically change an intensity of the light generated by the light generator, and to change an amplitude of the intensity change of the generated light according to the irradiation direction; an imager configured to take an image of the measuring object; and a measuring portion configured to calculate the three-dimensional form of the measuring object based on the image of the measuring object.