FOUP Air Gap Sealing via Moving Case and Blocking Plate

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Solution Overview

Problem

The existing substrate storage containers face issues with air pressure differences and clearance between the lid and the mounting table, allowing polluted clean room air to enter and contaminate the substrates during processing, leading to potential product failures.

Innovation Solution

The implementation of a substrate storage container with an elastic member and a moving case mechanism that closes the air gap between the container and the mounting table, combined with a blocking plate mechanism or air curtain on the mounting table to prevent external air from entering during lid opening and closing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the lid of the FOUP is opened after docking, then the substrate can be accessed, but polluted clean room air enters the FOUP through the clearance, causing contamination

Engineering Contradiction:

Improvelid openingVSAvoidair contamination

Core Design Contradiction:

Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The blocking plate is moved to close the clearance between the FOUP and the mounting table before the lid is opened. This preliminary action prevents contaminated air from entering the FOUP when the lid is subsequently opened, eliminating the need to maintain a permanent seal that would prevent lid operation.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The blocking plate acts as an intermediary element that temporarily seals the clearance between the FOUP and the mounting table. It is positioned to block the air path when needed and removed or repositioned when substrate access is required, mediating between the need for a tight seal and the need for lid operability.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If a tight seal is maintained between the FOUP lid and the mounting table, then air contamination is prevented, but the lid cannot be opened for substrate access

Engineering Contradiction:

Improveair contamination preventionVSAvoidlid opening

Core Design Contradiction:

Object-affected harmful factorsVSEase of operation

Solution Approach 1:

The blocking plate is positioned to close the clearance before the lid opening operation begins. This allows the system to maintain a tight seal during substrate processing, then automatically or manually position the blocking plate to enable lid opening without exposing substrates to contamination.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The blocking plate is designed to be movable rather than fixed, allowing it to dynamically adjust its position. It can be moved to close the clearance when the FOUP is docked and sealed, and moved away when the lid needs to be opened, providing dynamic control over the seal without permanently preventing lid operation.

Inventive Principle:

Principle #15Dynamics

3Object-affected harmful factors

If the clearance between the FOUP and mounting table is reduced, then air leakage is minimized, but manufacturing tolerance and adjustment errors still produce gaps

Engineering Contradiction:

Improveair leakageVSAvoidclearance control

Core Design Contradiction:

Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The blocking plate serves as an intermediary component that compensates for manufacturing tolerances and adjustment errors. Rather than relying solely on precise manufacturing to eliminate gaps, the blocking plate is positioned to fill the clearance created by these tolerances, ensuring a tight seal despite variations in manufacturing precision.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The system changes the parameter of clearance control from a fixed manufacturing specification to a dynamically adjustable parameter. The blocking plate can be positioned at different locations to accommodate variations in clearance size caused by manufacturing tolerances, allowing the system to adapt to different gap sizes rather than requiring precise control of the original clearance.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively prevents the entry of polluted air into the substrate storage container, maintaining a clean environment and reducing the risk of contamination and product failures by ensuring a tight seal during processing.

Implementation Method 1

The substrate storage container includes an elastic member and a moving case mechanism that closes the air gap between the container and the mounting table

Methodology Applied

Scientific EffectElasticity: Elasticity

Implementation Method 2

a blocking plate mechanism or air curtain on the mounting table to prevent external air from entering during lid opening and closing

Methodology Applied

Scientific EffectAir curtain:

Data Source

PatentUS9698034B2Substrate storage container and substrate storage container mounting table

Publication Date: 2017.07.04 KIOXIA CORP

AI summary

In accordance with an embodiment, a substrate storage container includes first and second cases, a lid and a moving unit. The first case is provided with an opening to take in or out a substrate. The lid closes the opening. The second case can move in a first direction crossing a surface of the first case. The opening is provided on the surface. The moving unit moves the second case in the first direction in response to the opening of the lid.