FOUP Cleaning Device Steam Drying Snorkel Nozzle
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Solution Overview
Problem
Existing FOUP cleaning devices have low cleaning efficiency and prolonged drying times, especially for the snorkel nozzle, leading to process losses due to the limited penetration of cleaning liquids and extended drying periods.
Innovation Solution
A FOUP cleaning device and method utilizing a cleaning chamber with steam and compressed dry air, where hot deionized water and steam are mixed with compressed dry air to enhance cleaning efficiency, and nitrogen gas is used to dry the snorkel nozzle, combined with ultraviolet lamps for additional drying assistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If cleaning liquid is sprayed onto the FOUP surface, then cleaning is performed, but cleaning efficiency is low and drying time is prolonged
Solution Approach 1:
The patent changes the physical state of the cleaning medium from liquid to vapor (steam). Steam is generated by heating water and introduced into the FOUP to clean the surface. The steam condenses on the cooler FOUP surface, providing effective cleaning while the vapor phase allows for faster evaporation and drying compared to liquid spraying.
Solution Approach 2:
The patent replaces the mechanical liquid spraying system with a thermal field system using steam. Instead of using pumps and nozzles to spray liquid cleaning agents, the system uses a steam generator to produce vapor that is introduced into the FOUP. This substitution of mechanical liquid delivery with thermal vapor delivery improves both cleaning efficiency and drying speed.
2Manufacturing precision
If cleaning liquid is used to clean the snorkel nozzle, then cleaning is performed, but drying time is extended and process loss occurs
Solution Approach 1:
The patent applies steam (vapor phase) instead of liquid to clean the snorkel nozzle. The steam penetrates the porous structure of the snorkel nozzle effectively, and because it is in vapor form, it evaporates rapidly after cleaning, significantly reducing drying time and preventing process losses associated with prolonged drying.
Solution Approach 2:
The patent replaces liquid-based cleaning mechanisms with steam-based cleaning for the snorkel nozzle. This substitution eliminates the need for prolonged drying periods required by liquid cleaning, thereby improving productivity and preventing process losses while maintaining or enhancing cleaning quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly improves cleaning and drying efficiency for both the FOUP body and cover, reducing drying times and preventing process losses by ensuring thorough cleaning and rapid drying of the snorkel nozzle.
Implementation Method 1
a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam
Implementation Method 2
The steam may be mixed with compressed dry air
Implementation Method 3
combined with ultraviolet lamps for additional drying assistance
Data Source
AI summary
An embodiment of the present subject matter including a FOUP body and a FOUP cover includes: a loading and unloading part configured to load or unload the FOUP; a standby part which is provided at one side of the loading and unloading part and on which the FOUP body and the FOUP cover are separated from or coupled to each other; a cleaning chamber configured to clean the FOUP body and the FOUP cover using steam; and a robot configured to transport the FOUP body and the FOUP cover between the standby part and the cleaning chamber.