Integrated FOUP Cleaning System Vacuum Drying
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Solution Overview
Problem
The semiconductor industry faces challenges in efficiently cleaning and drying Front Opening Unified Pod (FOUP) containers due to the need for frequent cleaning cycles, which requires shorter cleaning times and reduced consumables while maintaining high cleanliness standards, and existing methods are inefficient and require multiple moving parts.
Innovation Solution
An integrated cleaning and drying system that combines wet cleaning with vacuum drying in the same process chamber, utilizing ultrasonic or high-pressure spray with deionized water, and IR heating to minimize liquid residue and eliminate moving parts, along with a robot-assisted transfer mechanism for efficient handling of container lids and bodies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional separate cleaning and drying equipment is used, then cleaning function is provided, but cleaning time is long and system complexity is high
Solution Approach 1:
The patent combines cleaning and drying functions into a single integrated chamber, eliminating the need for separate cleaning and drying equipment. This merging of functions reduces system complexity and improves reliability by removing interfaces between separate systems while maintaining both cleaning and drying capabilities within one unified apparatus.
Solution Approach 2:
The cleaning chamber is designed to perform multiple functions: wet cleaning, drying, and heating, all within the same space. This multi-functionality eliminates the need for dedicated separate equipment for each operation, reducing overall system complexity while maintaining comprehensive cleaning and drying capabilities.
2Manufacturing precision
If frequent cleaning cycles are performed, then cleanliness standard is maintained, but cleaning consumables increase and cleaning time accumulates
Solution Approach 1:
The integrated system allows continuous operation where cleaning and drying occur in sequence within the same chamber without requiring intermediate handling or transfer. This continuous process reduces total cleaning time while maintaining cleanliness standards through efficient sequential operations.
Solution Approach 2:
The system performs preliminary heating and vacuum preparation before the actual drying phase, and uses optimized spray patterns during cleaning to minimize liquid usage. These preliminary and optimized actions reduce the time and consumables needed for subsequent operations.
3Ease of operation
If traditional drying methods with moving parts are used, then drying function is provided, but system reliability decreases
Solution Approach 1:
The patent replaces mechanical drying systems with moving parts (such as rotating components or mechanical conveyors) with a vacuum-based drying system that uses atmospheric pressure differentials and heated airflow. This substitution eliminates mechanical wear and failure points while maintaining effective drying function.
Solution Approach 2:
The drying process operates in a vacuum environment, creating an inert atmosphere that prevents contamination and eliminates the need for mechanical components that would require maintenance. The vacuum environment itself facilitates drying through reduced atmospheric pressure and enhanced evaporation.
4Manufacturing precision
If more cleaning liquid is used, then cleaning thoroughness is improved, but liquid residue increases and drying complexity increases
Solution Approach 1:
The system changes the physical parameters of the cleaning liquid by using heated spray and controlling vaporization rates. This allows thorough cleaning with minimal liquid application, as the heated environment promotes rapid evaporation and reduces the amount of liquid needed while preventing excessive residue.
Solution Approach 2:
The integrated chamber uses phase transition from liquid to vapor during the drying cycle, where heated air converts residual liquid cleaning solution into vapor that is then removed by the vacuum system. This phase transition efficiently eliminates liquid residue without requiring additional mechanical drying components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces cleaning time and consumables, ensures thorough cleanliness, improves system reliability by eliminating moving parts, and enhances throughput by integrating cleaning and drying processes within a single chamber.
Implementation Method 1
a vacuum pump system for removing liquid and vapor from the chamber by delivering sub-atmospheric pressure to the chamber
Implementation Method 2
a plurality of IR heaters for delivering thermal energy to the container inner and outer surfaces
Implementation Method 3
a plurality of nozzles for delivering a cleaning mixture to the container inner and outer surfaces
Data Source
AI summary
Methods and apparatuses for integrated cleaning of objects comprising a sequence of wet cleaning and vacuum drying in a same process chamber. The present integrated cleaning process can eliminate moving parts, improving the system reliability. Vacuum decontamination can be included for degassing and decontaminating the cleaned objects. In an embodiment, a cleaner system combines various movements into an integrated movement to be handled by a robot, for example, to improve the throughput. For example, an integrated robot movement comprising picking up a closed container from the input load port, moving both the lid and body together, and then depositing the body and lid separately into the appropriate positions in the cleaner to be cleaned.